{"title":"Absolute detection method based on multi-signal phase extraction and separation","authors":"Yi Hou , Zhisong Li , Xin Tang","doi":"10.1016/j.optlaseng.2024.108637","DOIUrl":null,"url":null,"abstract":"<div><div>The development of optical systems requires high-precision inspection technology, which supports the manufacturing and integration of optical systems. Currently, the method commonly used for high-precision optical plane inspection is interferometry based on the reference plane, however, its inspection accuracy is constrained by the accuracy of the reference plane. Therefore, this paper proposes an absolute detection method based on multi-signal phase extraction, which simplifies the detection process and effectively improves the detection accuracy. Firstly, the method detects the planes by utilizing the rotational translation method, secondly, the multi-surface separation technique is utilized to extract and separate the face shapes of the three surfaces in the rotational translation method, and lastly, the reference plane error is calibrated and excluded from the measurement results to accurately obtain the surface morphology of the component under test. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"184 ","pages":"Article 108637"},"PeriodicalIF":3.5000,"publicationDate":"2024-10-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0143816624006158","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}
引用次数: 0
Abstract
The development of optical systems requires high-precision inspection technology, which supports the manufacturing and integration of optical systems. Currently, the method commonly used for high-precision optical plane inspection is interferometry based on the reference plane, however, its inspection accuracy is constrained by the accuracy of the reference plane. Therefore, this paper proposes an absolute detection method based on multi-signal phase extraction, which simplifies the detection process and effectively improves the detection accuracy. Firstly, the method detects the planes by utilizing the rotational translation method, secondly, the multi-surface separation technique is utilized to extract and separate the face shapes of the three surfaces in the rotational translation method, and lastly, the reference plane error is calibrated and excluded from the measurement results to accurately obtain the surface morphology of the component under test. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods.
期刊介绍:
Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods.
Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following:
-Optical Metrology-
Optical Methods for 3D visualization and virtual engineering-
Optical Techniques for Microsystems-
Imaging, Microscopy and Adaptive Optics-
Computational Imaging-
Laser methods in manufacturing-
Integrated optical and photonic sensors-
Optics and Photonics in Life Science-
Hyperspectral and spectroscopic methods-
Infrared and Terahertz techniques