Absolute detection method based on multi-signal phase extraction and separation

IF 3.5 2区 工程技术 Q2 OPTICS Optics and Lasers in Engineering Pub Date : 2024-10-16 DOI:10.1016/j.optlaseng.2024.108637
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Abstract

The development of optical systems requires high-precision inspection technology, which supports the manufacturing and integration of optical systems. Currently, the method commonly used for high-precision optical plane inspection is interferometry based on the reference plane, however, its inspection accuracy is constrained by the accuracy of the reference plane. Therefore, this paper proposes an absolute detection method based on multi-signal phase extraction, which simplifies the detection process and effectively improves the detection accuracy. Firstly, the method detects the planes by utilizing the rotational translation method, secondly, the multi-surface separation technique is utilized to extract and separate the face shapes of the three surfaces in the rotational translation method, and lastly, the reference plane error is calibrated and excluded from the measurement results to accurately obtain the surface morphology of the component under test. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods. The experimental results show that the present method reduces the PV of the residual error by about 25 % and reduces the RMS of the residual error by about 30 % compared to the existing absolute detection methods.
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基于多信号相提取和分离的绝对检测方法
光学系统的发展需要高精度检测技术,以支持光学系统的制造和集成。目前,高精度光学平面检测常用的方法是基于基准面的干涉测量法,但其检测精度受到基准面精度的制约。因此,本文提出了一种基于多信号相位提取的绝对检测方法,简化了检测过程,有效提高了检测精度。首先,该方法利用旋转平移法检测平面;其次,利用多表面分离技术提取并分离旋转平移法中三个表面的面形;最后,校准参考平面误差并将其从测量结果中排除,从而准确获得被测部件的表面形貌。实验结果表明,与现有的绝对检测方法相比,本方法可将残余误差的 PV 值降低约 25%,将残余误差的 RMS 值降低约 30%。实验结果表明,与现有的绝对检测方法相比,本方法可将残余误差的 PV 值降低约 25%,将残余误差的均方根值降低约 30%。
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来源期刊
Optics and Lasers in Engineering
Optics and Lasers in Engineering 工程技术-光学
CiteScore
8.90
自引率
8.70%
发文量
384
审稿时长
42 days
期刊介绍: Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques
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