{"title":"A Single MEMS Sensor Based on SnO₂ Nanosheets for Selective Gas Identification","authors":"Wenxin Luo;Jianhao Li;Mingjie Li","doi":"10.1109/TED.2024.3464573","DOIUrl":null,"url":null,"abstract":"In recent years, the challenge of poor selectivity in a single gas sensor has received significant interest. This work presents a facile method for the concurrent analysis of sensor temperature variations and conductivity changes in a SnO2 nanosheets-based gas sensor, enabling the selective detection of various gases (such as H2, NH3, and CO). When exposed to reducing gases, the sensor typically exhibits increases in temperature (calorimetric readout) and current (chemo-resistive readout), resulting from the exothermic reaction between the gases and surface oxygen species. The integrated assessment of temperature elevation and conductivity alterations in a single sensor offers an innovative strategy for gas identification and concentration measurement.","PeriodicalId":13092,"journal":{"name":"IEEE Transactions on Electron Devices","volume":"71 11","pages":"7016-7021"},"PeriodicalIF":2.9000,"publicationDate":"2024-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Electron Devices","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10702192/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
In recent years, the challenge of poor selectivity in a single gas sensor has received significant interest. This work presents a facile method for the concurrent analysis of sensor temperature variations and conductivity changes in a SnO2 nanosheets-based gas sensor, enabling the selective detection of various gases (such as H2, NH3, and CO). When exposed to reducing gases, the sensor typically exhibits increases in temperature (calorimetric readout) and current (chemo-resistive readout), resulting from the exothermic reaction between the gases and surface oxygen species. The integrated assessment of temperature elevation and conductivity alterations in a single sensor offers an innovative strategy for gas identification and concentration measurement.
期刊介绍：
IEEE Transactions on Electron Devices publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors. Tutorial and review papers on these subjects are also published and occasional special issues appear to present a collection of papers which treat particular areas in more depth and breadth.
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