Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-11-05 DOI:10.1038/s41378-024-00818-x
Sheng Yu, Jiangkun Sun, Yongmeng Zhang, Xiang Xi, Kun Lu, Yan Shi, Dingbang Xiao, Xuezhong Wu
{"title":"Real-time correction of gain nonlinearity in electrostatic actuation for whole-angle micro-shell resonator gyroscope.","authors":"Sheng Yu, Jiangkun Sun, Yongmeng Zhang, Xiang Xi, Kun Lu, Yan Shi, Dingbang Xiao, Xuezhong Wu","doi":"10.1038/s41378-024-00818-x","DOIUrl":null,"url":null,"abstract":"<p><p>MEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and Power (CSWaP), which have inspired great research attention in recent years. A higher signal-to-noise ratio (SNR) for MEMS gyroscopes operating at larger vibrating amplitudes provides improved measuring resolution and ARW performance. However, the increment of amplitude causes strong nonlinear effects of MEMS gyroscopes due to their micron size, which has negative influences on the performance. This paper carries out detailed research on a general nonlinear mechanism on the sensors using parallel-plate capacitive transducers, which is called the gain nonlinearity in electrostatic actuation. The theoretical model established in this paper demonstrates the actuation gain nonlinearity causes the control-force coupling and brings extra angle-dependent bias with the 4<sup>th</sup> component for the whole-angle gyroscopes, which are verified by the experiments carried out on a micro-shell resonator gyroscope (MSRG). Furthermore, a real-time correction method is proposed to restore a linear response of the electrostatic actuation, which is realized by the gain modification with an online parameter estimation based on the harmonic-component relationship of capacitive detection. This real-time correction method could reduce the 4<sup>th</sup> component of the angle-dependent bias by over 95% from 0.003°/s to less than 0.0001°/s even under different temperatures. After the correction of actuation gain nonlinearity, the bias instability (BI) of whole-angle MSRG is improved by about 3.5 times from 0.101°/h to 0.029°/h and the scale factor nonlinearity (SFN) is reduced by almost one order of magnitude from 2.02 ppm to 0.21 ppm.</p>","PeriodicalId":18560,"journal":{"name":"Microsystems & Nanoengineering","volume":null,"pages":null},"PeriodicalIF":7.3000,"publicationDate":"2024-11-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://www.ncbi.nlm.nih.gov/pmc/articles/PMC11535526/pdf/","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Microsystems & Nanoengineering","FirstCategoryId":"5","ListUrlMain":"https://doi.org/10.1038/s41378-024-00818-x","RegionNum":1,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}
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Abstract

MEMS gyroscopes are well known for their outstanding advantages in Cost Size Weight and Power (CSWaP), which have inspired great research attention in recent years. A higher signal-to-noise ratio (SNR) for MEMS gyroscopes operating at larger vibrating amplitudes provides improved measuring resolution and ARW performance. However, the increment of amplitude causes strong nonlinear effects of MEMS gyroscopes due to their micron size, which has negative influences on the performance. This paper carries out detailed research on a general nonlinear mechanism on the sensors using parallel-plate capacitive transducers, which is called the gain nonlinearity in electrostatic actuation. The theoretical model established in this paper demonstrates the actuation gain nonlinearity causes the control-force coupling and brings extra angle-dependent bias with the 4th component for the whole-angle gyroscopes, which are verified by the experiments carried out on a micro-shell resonator gyroscope (MSRG). Furthermore, a real-time correction method is proposed to restore a linear response of the electrostatic actuation, which is realized by the gain modification with an online parameter estimation based on the harmonic-component relationship of capacitive detection. This real-time correction method could reduce the 4th component of the angle-dependent bias by over 95% from 0.003°/s to less than 0.0001°/s even under different temperatures. After the correction of actuation gain nonlinearity, the bias instability (BI) of whole-angle MSRG is improved by about 3.5 times from 0.101°/h to 0.029°/h and the scale factor nonlinearity (SFN) is reduced by almost one order of magnitude from 2.02 ppm to 0.21 ppm.

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全角微壳共振陀螺仪静电驱动增益非线性实时校正。
众所周知,MEMS 陀螺仪在成本、尺寸、重量和功耗(CSWaP)方面具有突出优势,近年来引起了研究人员的极大关注。在更大振动振幅下工作的 MEMS 陀螺仪具有更高的信噪比(SNR),从而提高了测量分辨率和 ARW 性能。然而,由于 MEMS 陀螺仪的微米尺寸,振幅的增大会对其产生强烈的非线性效应,从而对其性能产生负面影响。本文详细研究了使用平行板电容式传感器的传感器的一般非线性机制,即静电致动中的增益非线性。本文建立的理论模型证明了致动增益非线性会导致控制力耦合,并为全角度陀螺仪带来与角度相关的第四分量额外偏差,这一点已通过在微壳谐振器陀螺仪(MSRG)上进行的实验得到验证。此外,还提出了一种恢复静电致动线性响应的实时校正方法,该方法通过增益修正和基于电容检测谐波分量关系的在线参数估计来实现。即使在不同的温度条件下,这种实时修正方法也能将与角度有关的偏差的第 4 分量从 0.003°/s 降至 0.0001°/s 以下,降幅超过 95%。在修正了致动增益非线性之后,全角度 MSRG 的偏置不稳定性 (BI) 从 0.101°/h 降至 0.029°/h,提高了约 3.5 倍,比例因子非线性 (SFN) 从 2.02 ppm 降至 0.21 ppm,降低了近一个数量级。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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