A double-sided 3D trench electrode detector using an 8-inch CMOS process: 3D simulation and experimental investigation

IF 1.5 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment Pub Date : 2024-10-15 DOI:10.1016/j.nima.2024.169943

Manwen Liu , Shuai Jiang , Wenzheng Cheng , Huimin Ji , Zhihua Li , Zheng Li

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Abstract

A double-sided 3D trench electrode detector (DS-3DTED) structure is proposed in this work to investigate the manufacturing process implementation of 3D detectors for high-energy physics, x-ray spectroscopy and x-ray cosmology applications. The device's electrical characterization, including electrostatic potential and electric field distributions, I–V, C–V, full depletion voltage and transient current with x-ray incidence, was performed with Synopsys® Sentaurus TCAD tools. In addition, a manufacturing method to realize the DS-3DTED device is presented. A 311 μm deep trench has been achieved through the Bosch process on the IMECAS 8-inch CMOS platform to verify the feasibility of the device structure. The maximum depth-to-width ratio is close to 105:1 when the trench width is 2 μm, which is an excellent foundation for manufacturing future 3D detector with a large fill factor and small dead region.

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采用 8 英寸 CMOS 工艺的双面 3D 沟槽电极探测器：三维模拟和实验研究

本研究提出了一种双面三维沟槽电极探测器（DS-3DTED）结构，以研究用于高能物理、X 射线光谱学和 X 射线宇宙学应用的三维探测器的制造工艺实现。利用 Synopsys® Sentaurus TCAD 工具对该器件进行了电学表征，包括静电势和电场分布、I-V、C-V、全耗尽电压和 X 射线入射时的瞬态电流。此外，还介绍了实现 DS-3DTED 器件的制造方法。在 IMECAS 8 英寸 CMOS 平台上，通过博世工艺实现了 311 μm 的深沟槽，验证了器件结构的可行性。当沟槽宽度为 2 μm 时，最大深度与宽度之比接近 105:1，这为制造具有大填充因子和小死区的未来 3D 探测器奠定了良好基础。

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来源期刊

Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment 物理-光谱学

CiteScore

3.20

自引率

21.40%

发文量

787

审稿时长

1 months

期刊介绍： Section A of Nuclear Instruments and Methods in Physics Research publishes papers on design, manufacturing and performance of scientific instruments with an emphasis on large scale facilities. This includes the development of particle accelerators, ion sources, beam transport systems and target arrangements as well as the use of secondary phenomena such as synchrotron radiation and free electron lasers. It also includes all types of instrumentation for the detection and spectrometry of radiations from high energy processes and nuclear decays, as well as instrumentation for experiments at nuclear reactors. Specialized electronics for nuclear and other types of spectrometry as well as computerization of measurements and control systems in this area also find their place in the A section. Theoretical as well as experimental papers are accepted.

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