Tensile-Strained GeSn Microbridge Lasers with Lithographically Controllable Emission Wavelengths

IF 6.5 1区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY ACS Photonics Pub Date : 2024-11-06 DOI:10.1021/acsphotonics.4c01173
Melvina Chen, Hyo-Jun Joo, Youngmin Kim, Eng Huat Toh, Elgin Quek, Zoran Ikonic, Wei Du, Shui-Qing Yu, Donguk Nam
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Abstract

GeSn alloys are considered a promising solution to long-sought on-chip industry-compatible light sources. Relentless efforts to improve the performance of GeSn lasers include utilizing tensile strain engineering. However, inducing tensile strain in GeSn has been challenging due to residual compressive strain in the GeSn layer, necessitating complex fabrication processes such as multiple deposition of external stressors. Here, we demonstrate tensile-strained GeSn microbridge lasers by harnessing a geometric strain-inversion technique enabled by a single lithography step. Multiple lasers producing different emission wavelengths were fabricated on a single chip by lithographically controlling the tensile strain. Upon the application of tensile strain, the emission wavelength was tuned by more than 45 nm, while the laser threshold was reduced by almost 70%. This work presents a simple, cost-effective way to build a large array of on-chip lasers emitting different colors. This method holds potential for applications such as wavelength division multiplexing with on-chip lasers.

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具有光刻可控发射波长的拉伸应变 GeSn 微桥激光器
GeSn 合金被认为是一种很有前途的解决方案,可用于长期以来一直寻求的芯片上工业兼容光源。提高 GeSn 激光器性能的不懈努力包括利用拉伸应变工程。然而,由于 GeSn 层中残留的压缩应变,在 GeSn 中诱导拉伸应变一直具有挑战性,这就需要复杂的制造工艺,如多次沉积外部应力源。在这里,我们利用单个光刻步骤实现的几何应变反转技术,展示了拉伸应变的 GeSn 微桥激光器。通过光刻控制拉伸应变,在单个芯片上制造出了多个产生不同发射波长的激光器。施加拉伸应变后,发射波长可调整 45 纳米以上,而激光阈值则降低了近 70%。这项研究提出了一种简单、经济高效的方法,用于构建发射不同颜色的大型片上激光器阵列。这种方法具有应用潜力,例如利用片上激光器实现波分复用。
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来源期刊
ACS Photonics
ACS Photonics NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
11.90
自引率
5.70%
发文量
438
审稿时长
2.3 months
期刊介绍: Published as soon as accepted and summarized in monthly issues, ACS Photonics will publish Research Articles, Letters, Perspectives, and Reviews, to encompass the full scope of published research in this field.
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