Synthesis and characterization of ZnO and Au/ZnO thin films for ethanol gas sensing application

IF 2.5 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Applied Physics A Pub Date : 2024-11-08 DOI:10.1007/s00339-024-07984-9
Fatemeh Montazeri Davoodi, Seyed Mohammad Rozati, Sahar Soltani
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Abstract

Undoped zinc oxide (ZnO) and Au/ZnO thin films have been deposited on glass substrates using spray pyrolysis and sputtering methods. The impact of substrate temperature and Au thickness on the structural, electrical, optical, and ethanol sensing properties of the deposited films has been investigated. X-ray diffraction (XRD) patterns reveal a polycrystalline structure across all samples. Notably, for pure ZnO deposited at 500 °C, the (002) orientation exhibits a substantial increase in intensity compared to samples deposited at other temperatures and the layer reaches its superior crystalline state. Substrate temperature demonstrates a significant effect on the electrical resistance of ZnO. Increasing the substrate temperature from 350 to 550 °C results in a notable decrease in sheet resistance, ranging from 34.4 [MΩ/cm2] to 54.2 [KΩ/cm2]. The ZnO film deposited at a substrate temperature of 500 °C displays the lowest sheet resistance. Sputter-depositing a 10 Å of gold (Au) on top of the ZnO layer results in a simultaneous decrease in sheet resistance from 54.2 [KΩ/cm2] to 7.02 [KΩ/cm2], while it doesn’t have considerable effect on the transparency of layer. The effect of substrate temperature on ethanol sensing characteristics of ZnO has been investigated. According to the results, at the temperature of 350 °C, ZnO layer has a superior response compared to the other samples. As the substrate temperature increases, the response of the layers decreases. The film deposited at 500 °C showing predominant orientation (002), demonstrates a weak ethanol sensing feature compared to other layers. Ethanol sensing characteristics of the Au/ZnO double layer were also examined, encompassing parameters such as dynamic response, sensitivity, response/recovery times, and operational temperature. Sputtering of Au on the top of ZnO exhibits a significant improvement in gas sensitivity. Further investigation indicates that increasing the Au thickness to 40 Å contributes to sensitivity increase. However, beyond this thickness, a diminishing trend in sensitivity has been observed. According to our search, there is no report for synthesis and characterization of Au/ZnO double layer by employing two methods of spray pyrolysis and sputtering. The layers exhibit superior homogeneity and crystallization compared to other reports. Also the layers exhibit excellent gas sensing properties toward ethanol gas. The response and recovery time have low values. The gas sensitivity of Au/ZnO thin film has high value of 5 toward 200 ppm ethanol gas. According to the selectivity graph by sputtering Au on top of ZnO layer the gas selectivity toward ethanol gas enhances. The layers show good stability.

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用于乙醇气体传感的氧化锌和金/氧化锌薄膜的合成与表征
采用喷雾热解和溅射方法在玻璃基底上沉积了未掺杂的氧化锌(ZnO)和金/氧化锌薄膜。研究了基底温度和金厚度对沉积薄膜的结构、电学、光学和乙醇传感特性的影响。X 射线衍射 (XRD) 图显示,所有样品都具有多晶结构。值得注意的是,对于在 500 °C 下沉积的纯氧化锌,与在其他温度下沉积的样品相比,(002) 取向的强度大幅增加,并且该层达到了优越的结晶状态。基底温度对氧化锌的电阻有显著影响。将基底温度从 350 ℃ 提高到 550 ℃ 会显著降低薄膜电阻,从 34.4 [MΩ/cm2] 到 54.2 [KΩ/cm2]。在基底温度为 500 °C 时沉积的氧化锌薄膜显示出最低的薄层电阻。在氧化锌层上溅射沉积 10 Å 的金(Au)会使片状电阻从 54.2 [KΩ/cm2] 下降到 7.02 [KΩ/cm2],但对薄膜的透明度没有太大影响。研究了衬底温度对氧化锌乙醇传感特性的影响。结果表明,在 350 °C 的温度下,氧化锌层的响应优于其他样品。随着基底温度的升高,各层的响应降低。在 500 °C 下沉积的薄膜显示出主要取向(002),与其他层相比,其乙醇感应特性较弱。还研究了金/氧化锌双层膜的乙醇传感特性,包括动态响应、灵敏度、响应/恢复时间和工作温度等参数。在氧化锌顶层溅射金可显著提高气体灵敏度。进一步的研究表明,将金的厚度增加到 40 Å 有助于提高灵敏度。然而,超过这一厚度后,灵敏度呈下降趋势。根据我们的搜索,目前还没有采用喷雾热解和溅射两种方法合成金/氧化锌双层并对其进行表征的报告。与其他报告相比,该层显示出卓越的均匀性和结晶性。此外,该层还对乙醇气体具有出色的气体传感性能。响应和恢复时间的数值都很低。金/氧化锌薄膜对 200 ppm 乙醇气体的灵敏度高达 5。根据选择性曲线图,在氧化锌层上溅射金,可提高对乙醇气体的选择性。薄膜层显示出良好的稳定性。
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来源期刊
Applied Physics A
Applied Physics A 工程技术-材料科学:综合
CiteScore
4.80
自引率
7.40%
发文量
964
审稿时长
38 days
期刊介绍: Applied Physics A publishes experimental and theoretical investigations in applied physics as regular articles, rapid communications, and invited papers. The distinguished 30-member Board of Editors reflects the interdisciplinary approach of the journal and ensures the highest quality of peer review.
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