Research on ultra-clean micro gas flow calibration technology of passive piston type with sealing

IF 2.3 3区工程技术 Q2 ENGINEERING, MECHANICAL Flow Measurement and Instrumentation Pub Date : 2024-11-09 DOI:10.1016/j.flowmeasinst.2024.102735

Hongming Yang, Ya Xu, Tong Liu, Tiejun Liu, Zhenwei Huang, Dailiang Xie

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Abstract

Aiming at the portable measurement and calibration needs of ultra-clean micro gas flow meters in the semiconductor industry, this paper designs an ultra-clean micro gas flow standard device based on passive piston type with sealing. The device adopts a horizontal structure, using the O-ring on the piston for radial sealing, unlike the traditional mercury and gap sealing, this design avoids the stringent requirements for piston speed and clearance. To increase automation of the calibration process, an automatic calibration system is built. Mathematical modeling and 6DOF dynamic mesh analysis are used to ensure that the piston operates at a stable stage. Through the uncertainty analysis, the extended uncertainty of the device reaches 0.21 % (k = 2). The uncertainty was verified by normalizing the deviation E_n and the results show that it is feasible to trace the clean gas flow rate with the piston standard device.

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带密封的被动活塞式超洁净微气流校准技术研究

针对半导体行业超洁净微气体流量计的便携式测量和标定需求，本文设计了一种基于无源活塞式带密封的超洁净微气体流量标准装置。该装置采用水平结构，利用活塞上的 O 形圈进行径向密封，与传统的水银密封和间隙密封不同，这种设计避免了对活塞速度和间隙的严格要求。为提高校准过程的自动化程度，建立了自动校准系统。通过数学建模和 6DOF 动态网格分析，确保活塞在稳定阶段运行。通过不确定性分析，设备的扩展不确定性达到 0.21 %（k = 2）。通过对偏差 En 进行归一化，对不确定度进行了验证，结果表明利用活塞标准装置跟踪洁净气体流量是可行的。

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来源期刊

Flow Measurement and Instrumentation 工程技术-工程：机械

CiteScore

4.30

自引率

13.60%

发文量

123

审稿时长

6 months

期刊介绍： Flow Measurement and Instrumentation is dedicated to disseminating the latest research results on all aspects of flow measurement, in both closed conduits and open channels. The design of flow measurement systems involves a wide variety of multidisciplinary activities including modelling the flow sensor, the fluid flow and the sensor/fluid interactions through the use of computation techniques; the development of advanced transducer systems and their associated signal processing and the laboratory and field assessment of the overall system under ideal and disturbed conditions. FMI is the essential forum for critical information exchange, and contributions are particularly encouraged in the following areas of interest: Modelling: the application of mathematical and computational modelling to the interaction of fluid dynamics with flowmeters, including flowmeter behaviour, improved flowmeter design and installation problems. Application of CAD/CAE techniques to flowmeter modelling are eligible. Design and development: the detailed design of the flowmeter head and/or signal processing aspects of novel flowmeters. Emphasis is given to papers identifying new sensor configurations, multisensor flow measurement systems, non-intrusive flow metering techniques and the application of microelectronic techniques in smart or intelligent systems. Calibration techniques: including descriptions of new or existing calibration facilities and techniques, calibration data from different flowmeter types, and calibration intercomparison data from different laboratories. Installation effect data: dealing with the effects of non-ideal flow conditions on flowmeters. Papers combining a theoretical understanding of flowmeter behaviour with experimental work are particularly welcome.