Bertrand Lacroix, Asunción Fernández, N.C. Pyper, Alex J.W. Thom, Colm T. Whelan
{"title":"On the characteristics of helium filled nano-pores in amorphous silicon thin films","authors":"Bertrand Lacroix, Asunción Fernández, N.C. Pyper, Alex J.W. Thom, Colm T. Whelan","doi":"10.1016/j.apsusc.2024.161772","DOIUrl":null,"url":null,"abstract":"A joint theory–experimental study is presented of irregularly shaped nano-pores in amorphous silicon. STEM– ELLS spectra were measured for each pore. The observed helium <span><math><mrow is=\"true\"><mn is=\"true\">1</mn><msup is=\"true\"><mrow is=\"true\"><mi is=\"true\">s</mi></mrow><mrow is=\"true\"><mn is=\"true\">2</mn></mrow></msup><mo is=\"true\">→</mo><mn is=\"true\">1</mn><mi is=\"true\">s</mi><mn is=\"true\">2</mn><mi is=\"true\">p</mi></mrow></math></span>(<sup>1</sup><em>P</em>) excitation energies were found to be shifted from that of a free atom. The relation between the helium density in the pore and these energy shifts is explored and shown to be completely consistent with earlier studies of helium in its bulk condensed phases as well as encapsulated as bubbles in solid silicon. The density, pressure and depth of the pores, all key properties for applications, were determined. An alternative and novel method for determining the depth of the pores more accurately is presented.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"21 1","pages":""},"PeriodicalIF":6.3000,"publicationDate":"2024-11-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Surface Science","FirstCategoryId":"88","ListUrlMain":"https://doi.org/10.1016/j.apsusc.2024.161772","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
Abstract
A joint theory–experimental study is presented of irregularly shaped nano-pores in amorphous silicon. STEM– ELLS spectra were measured for each pore. The observed helium (1P) excitation energies were found to be shifted from that of a free atom. The relation between the helium density in the pore and these energy shifts is explored and shown to be completely consistent with earlier studies of helium in its bulk condensed phases as well as encapsulated as bubbles in solid silicon. The density, pressure and depth of the pores, all key properties for applications, were determined. An alternative and novel method for determining the depth of the pores more accurately is presented.
期刊介绍：
Applied Surface Science covers topics contributing to a better understanding of surfaces, interfaces, nanostructures and their applications. The journal is concerned with scientific research on the atomic and molecular level of material properties determined with specific surface analytical techniques and/or computational methods, as well as the processing of such structures.
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