Self-Organizing Processes in the Structure of CrTiZrNbHf (HEA) Ion-Plasma Coatings Obtained Using a Multicathode Arc Spraying Technology

Abstract

A three-cathode arc-based evaporation system has been used to obtain vacuum ion-plasma high-entropy CrTiZrNbHf coatings. The statistically averaged concentration of components in the coating corresponds to Cr_0.30Ti_0.35Zr_0.25Nb_0.08Hf_0.01. The kinetics of the coating deposition and the process of its structure self-organization have been studied by constructing a diagram of the Movchan–Demchishin–Thornton structure zone. Technological parameters such as the substrate temperature, vacuum chamber pressure, coating deposition rate, ion current density, bias voltage, etc., were combined into the form calculated. It is shown that, for the CrTiZrNbHf system under study, the critical value of the E_bi parameter amounts to about100 MJ/cm³. Exceeding this threshold leads to degeneration of the coating structure in the form of a nuclei-like or droplet-like morphology.