Highly dispersive multiplexed micromechanical device array for spatially resolved sensing and actuation.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-11-26 DOI:10.1038/s41378-024-00816-z
Leonardo Gregorat, Marco Cautero, Leonardo Vicarelli, Dario Giuressi, Alvise Bagolini, Alessandro Tredicucci, Giuseppe Cautero, Alessandro Pitanti
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Abstract

The powerful resource of parallelizing simple devices for realizing and enhancing complex operations comes with the drawback of multiple connections for addressing and controlling the individual elements. Here we report on a technological platform where several mechanical resonators can be individually probed and electrically actuated by using dispersive multiplexing within a single electrical channel. We demonstrate room temperature control of the individual device vibrational motion and spatially-resolved readouts. As the single elements have proven to be excellent bolometers and individual nodes for reservoir computing, our platform can be directly employed for single-channel addressing of multiple devices, with immediate applications for far-infrared cameras, spatial light modulators and recurrent neural networks operating at room temperature.

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用于空间分辨传感和驱动的高色散多路复用微机械装置阵列。
将简单设备并行化以实现和增强复杂操作是一种强大的资源,但其缺点是需要多个连接来寻址和控制各个元件。在这里,我们报告了一个技术平台,通过在单个电气通道内使用色散多路复用技术,可以对多个机械谐振器进行单独探测和电气驱动。我们展示了对单个器件振动运动和空间分辨读数的室温控制。由于单个元件已被证明是出色的波长计和储层计算的单个节点,我们的平台可直接用于多个器件的单通道寻址,并可立即应用于在室温下运行的远红外相机、空间光调制器和递归神经网络。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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