A Cylindrical Lens Spectrometer with Parallel Detection for Reflection Electron Energy Loss Spectroscopy.

IF 2.9 4区 工程技术 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Microscopy and Microanalysis Pub Date : 2025-02-17 DOI:10.1093/mam/ozae118
Junhyeok Hwang, In-Yong Park, Takashi Ogawa
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Abstract

Reflection electron energy loss spectroscopy (REELS) has played a pivotal role in allowing researchers to explore the characteristics of various bulk materials. This study presents results for the low-loss region of REELS with a new cylindrical lens spectrometer integrated into a low-voltage scanning electron microscope. The operational principles and implementation of the spectrometer are explained through comparisons between electron optical simulations and experimental results. Notably, the analysis shows the ability to distinguish samples in film and bulk forms. Graphene and graphite, despite their identical elemental composition and crystalline structure, are found to have distinct energy spectra as indicated by plasmon peaks. Furthermore, the study explores the bandgap measurement of SiO2 at low-energy conditions of 2.5 keV, highlighting the proposed instrument's advantages in the measurement without the harmful effect of Cherenkov loss. Additionally, this method reaffirms the capability to measure multiple plasmon peaks from the energy spectra of bulk gold samples, thus introducing a pioneering avenue in energy spectrum measurement. Leveraging the compact size and simple experimental setup of the spectrometer for REELS, the method enables the measurement of energy spectra of both bulk- and film-formed samples under low electron energy conditions, marking a significant advancement in the field.

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用于反射电子能量损失光谱学的平行探测圆柱透镜光谱仪。
反射电子能量损失光谱(REELS)在研究人员探索各种块状材料的特性方面发挥了举足轻重的作用。本研究介绍了利用集成在低压扫描电子显微镜中的新型圆柱透镜光谱仪进行 REELS 低损耗区域分析的结果。通过比较电子光学模拟和实验结果,解释了光谱仪的工作原理和实施方法。值得注意的是,该分析表明了区分薄膜和块状样品的能力。尽管石墨烯和石墨的元素组成和晶体结构完全相同,但通过等离子峰可以发现它们具有不同的能谱。此外,该研究还探讨了在 2.5 keV 的低能量条件下测量二氧化硅带隙的问题,凸显了拟议仪器在测量中无切伦科夫损耗有害影响的优势。此外,该方法再次证实了从块状金样品的能谱中测量多个等离子峰的能力,从而为能谱测量开辟了一条先河。利用 REELS 光谱仪的紧凑尺寸和简单实验设置,该方法能够在低电子能量条件下测量块状和薄膜状样品的能谱,标志着该领域的重大进展。
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来源期刊
Microscopy and Microanalysis
Microscopy and Microanalysis 工程技术-材料科学:综合
CiteScore
1.10
自引率
10.70%
发文量
1391
审稿时长
6 months
期刊介绍: Microscopy and Microanalysis publishes original research papers in the fields of microscopy, imaging, and compositional analysis. This distinguished international forum is intended for microscopists in both biology and materials science. The journal provides significant articles that describe new and existing techniques and instrumentation, as well as the applications of these to the imaging and analysis of microstructure. Microscopy and Microanalysis also includes review articles, letters to the editor, and book reviews.
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