Synergistic impact of Al2O3 capping layer and deposition temperature for enhancing the ferroelectricity of undoped-HfO2 thin films

IF 2.4 4区物理与天体物理 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Current Applied Physics Pub Date : 2024-11-28 DOI:10.1016/j.cap.2024.11.016

Sang Han Ko , Seung-Eon Moon , Sung Min Yoon

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Abstract

Synergistic effects of Al₂O₃ capping layer and deposition temperature, ranging from 220 to 280 °C, on the ferroelectric properties of undoped HfO₂ thin films were investigated. The use of an Al₂O₃ capping layer during atomic layer deposition (ALD) process was verified to induce a ferroelectric orthorhombic phase in undoped HfO₂ thin films, leading to a net remnant polarization (2P_r) of >20 μC/cm² when deposited <260 °C. The HfO₂ thin film deposited at 240 °C showed a low leakage current density of 5.7 × 10⁻⁶ A/cm² at an electric field of 2 MV/cm, accompanied by a high 2P_r and an endurance of >10⁷ cycles. Furthermore, the switching time for ferroelectric polarization reversal was estimated to range from 2.1 to 1.7 μs in the voltage range of 3.5–4.5 V. The results of this work demonstrated the impact of deposition temperature conditions on the ferroelectric properties of the HfO₂ thin films by means of the Al₂O₃ capping process.

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来源期刊

Current Applied Physics 物理-材料科学：综合

CiteScore

4.80

自引率

0.00%

发文量

213

审稿时长

33 days

期刊介绍： Current Applied Physics (Curr. Appl. Phys.) is a monthly published international journal covering all the fields of applied science investigating the physics of the advanced materials for future applications. Other areas covered: Experimental and theoretical aspects of advanced materials and devices dealing with synthesis or structural chemistry, physical and electronic properties, photonics, engineering applications, and uniquely pertinent measurement or analytical techniques. Current Applied Physics, published since 2001, covers physics, chemistry and materials science, including bio-materials, with their engineering aspects. It is a truly interdisciplinary journal opening a forum for scientists of all related fields, a unique point of the journal discriminating it from other worldwide and/or Pacific Rim applied physics journals. Regular research papers, letters and review articles with contents meeting the scope of the journal will be considered for publication after peer review. The Journal is owned by the Korean Physical Society.