Miniaturized silicon-based capacitive six-axis force/torque sensor with large range, high sensitivity, and low crosstalk.

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION Microsystems & Nanoengineering Pub Date : 2024-11-29 DOI:10.1038/s41378-024-00831-0
Renjie Tan, Yong Xia, Xiangguang Han, Linya Huang, Wendi Gao, Chen Jia, Ping Yang, Qijing Lin, Shujiang Ding, Chenying Wang, Libo Zhao
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Abstract

Miniaturized six-axis force/torque sensors have potential applications in robotic tactile sensing, minimally invasive surgery, and other narrow operating spaces, where currently available commercial sensors cannot meet the requirements because of their large size. In this study, a silicon-based capacitive six-axis force/torque sensing chip with a small size of 9.3 × 9.3 × 0.98 mm was designed, fabricated, and tested. A sandwich decoupling structure with a symmetrical layered arrangement of S-shaped beams, comb capacitors, and parallel capacitors was employed. A decoupling theory considering eccentricity and nonlinear effects was derived to realize low axial crosstalk. The proposed S-shaped beams achieved a large measurement range through stress optimization. The results of a coupled multiphysics field finite-element simulation agreed well with those of theoretical analyses. The test results show that the proposed sensing chip can detect six-axis force/torque separately, with all crosstalk errors less than 2.59%FS. Its force and torque measurement ranges can reach as much as 2.5 N and 12.5 N·mm, respectively. The sensing chip also has high sensitivities of 0.52 pF/N and 0.27 pF/(N·mm) for force and torque detection, respectively.

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小型化硅基电容式六轴力/扭矩传感器,具有大量程、高灵敏度和低串扰。
小型化的六轴力/扭矩传感器在机器人触觉传感、微创手术和其他狭窄的操作空间中有潜在的应用,目前可用的商用传感器由于体积大而无法满足要求。本研究设计、制作并测试了尺寸为9.3 × 9.3 × 0.98 mm的硅基电容式六轴力/转矩传感芯片。采用了s型梁、梳状电容器和并联电容器对称分层排列的夹层去耦结构。推导了考虑偏心和非线性效应的解耦理论,实现了低轴向串扰。本文提出的s型梁通过应力优化实现了较大的测量范围。耦合多物理场有限元模拟结果与理论分析结果吻合较好。测试结果表明,该传感芯片能够独立检测六轴力/力矩,串扰误差均小于2.59%FS。其力和扭矩测量范围分别可达2.5 N和12.5 N·mm。该传感芯片对力和扭矩的检测灵敏度分别为0.52 pF/N和0.27 pF/(N·mm)。
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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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