Preparation and Properties of High-Temperature Transient Thin-Film Thermopile Heat Flux Sensor

IF 2.2 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC Journal of Electronic Materials Pub Date : 2024-10-09 DOI:10.1007/s11664-024-11476-0

Shanghang Xie, Jin Zhu, Hongchuan Jiang, Xiaohui Zhao, Baorui Liu, Zhouxia Jia

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Abstract

The thermopile of the sensor consists of 192 pairs of Pt-PtRh10 thermocouples with length 1 mm and width 100 μm in serpentine series were deposited on Al₂O₃ ceramic substrates by a photolithography coating process. The thermal resistance layers with the proposed low thermal conductivity feature a meshed cavity structure, with four thermal resistance layers spaced over the thermopile contacts to enhance the sensitivity of the sensor. Calibration of the sensor’s sensitivity was performed by a flat-plate radiative heat flux device, while its response time was measured by a pulsed laser. Finally, the sensor’s performance in an actual application environment was simulated using a wind tunnel. The results showed that the thin-film heat flux sensor can operate in environments ranging from 200°C to 1500°C, with a sensitivity of 0.03067 m² μV/W, the maximum relative error was 8.5% with an average response time of 12.7 μs. The sample exhibited stable performance during wind tunnel testing, responding quickly to changes in heat flux.

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高温瞬态薄膜热电堆热流传感器的制备与性能研究

该传感器的热电堆由192对长1 mm、宽100 μm的Pt-PtRh10热电偶组成，采用光刻镀膜工艺沉积在Al2O3陶瓷衬底上。所提出的低导热系数的热阻层具有网状腔结构，在热电堆触点上间隔有四个热阻层，以提高传感器的灵敏度。利用平板辐射热通量仪标定传感器的灵敏度，利用脉冲激光测量传感器的响应时间。最后，利用风洞模拟了传感器在实际应用环境中的性能。结果表明，薄膜式热流通量传感器可在200 ~ 1500℃的工作环境中工作，灵敏度为0.03067 m2 μV/W，最大相对误差为8.5%，平均响应时间为12.7 μs。在风洞测试中，样品表现出稳定的性能，对热通量的变化反应迅速。图形抽象

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来源期刊

Journal of Electronic Materials 工程技术-材料科学：综合

CiteScore

4.10

自引率

4.80%

发文量

693

审稿时长

3.8 months

期刊介绍： The Journal of Electronic Materials (JEM) reports monthly on the science and technology of electronic materials, while examining new applications for semiconductors, magnetic alloys, dielectrics, nanoscale materials, and photonic materials. The journal welcomes articles on methods for preparing and evaluating the chemical, physical, electronic, and optical properties of these materials. Specific areas of interest are materials for state-of-the-art transistors, nanotechnology, electronic packaging, detectors, emitters, metallization, superconductivity, and energy applications. Review papers on current topics enable individuals in the field of electronics to keep abreast of activities in areas peripheral to their own. JEM also selects papers from conferences such as the Electronic Materials Conference, the U.S. Workshop on the Physics and Chemistry of II-VI Materials, and the International Conference on Thermoelectrics. It benefits both specialists and non-specialists in the electronic materials field. A journal of The Minerals, Metals & Materials Society.