A small cavity for detecting sound-induced flow.

Abstract

A study is presented of a method for creating an acoustic flow sensor that is generally compatible with current silicon microfabrication processes. An aim of this effort is to obtain a design consisting of a minimal departure from the existing designs employed in mass-produced silicon microphones. Because the primary component in all of these microphones is the cavity behind the pressure-sensing diaphragm, we begin with a study of the acoustic particle velocity within a cavity in a planar surface. The sound within the cavity is caused by the external plane sound wave traveling parallel to the cavity's open surface. It is shown that with suitable dimensions of the cavity, the acoustic particle velocity simultaneously flows inward at one end and outward at the other end of the single open cavity surface. A simple analytical model is presented to estimate the required length and depth of the cavity such that the acoustic particle velocity into and out of the opening is a reasonable approximation to that of a plane traveling sound wave in the free field. Measurements of the acoustic particle velocity into and out of the cavity are in close agreement with both the simple model and a more detailed finite element model. Agreement between two dissimilar modeling approaches and experiments suggests that the dominant features of the system have been accounted for. By redirecting the acoustic particle velocity into and out of the cavity opening rather than the flow being parallel to the plane surface, this configuration greatly facilitates the design and fabrication of structures intended to sense the acoustic flow.