G. V. Shvydkiy, K. V. Vavilin, I. I. Zadiriev, E. A. Kralkina, A. M. Nikonov
{"title":"Frequency Dependence of Ion Energy at the Outlet of a Capacitive RF Discharge Placed in an External Magnetic Field with a Predominant Radial Component","authors":"G. V. Shvydkiy, K. V. Vavilin, I. I. Zadiriev, E. A. Kralkina, A. M. Nikonov","doi":"10.1134/S1063780X24601883","DOIUrl":null,"url":null,"abstract":"<p>The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current<b>.</b></p>","PeriodicalId":735,"journal":{"name":"Plasma Physics Reports","volume":"50 11","pages":"1448 - 1451"},"PeriodicalIF":0.9000,"publicationDate":"2025-01-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Plasma Physics Reports","FirstCategoryId":"101","ListUrlMain":"https://link.springer.com/article/10.1134/S1063780X24601883","RegionNum":4,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q4","JCRName":"PHYSICS, FLUIDS & PLASMAS","Score":null,"Total":0}
引用次数: 0
Abstract
The frequency dependence of the energy and ion current at the output of an RF plasma source with SPT geometry has been investigated. It has been shown that the ion energy is maximum when operating at a frequency of 6.8 MHz. An increase in the operating frequency is accompanied by a decrease in ion energy. The ion current depends nonmonotonically on frequency. At frequencies less than 27.12 MHz, an increase in the ion energy is accompanied by a decrease in the current, and a decrease in the energy by an increase in the current. Increasing the frequency to 27.12 MHz does not lead to an increase in the ion current.
期刊介绍：
Plasma Physics Reports is a peer reviewed journal devoted to plasma physics. The journal covers the following topics: high-temperature plasma physics related to the problem of controlled nuclear fusion based on magnetic and inertial confinement; physics of cosmic plasma, including magnetosphere plasma, sun and stellar plasma, etc.; gas discharge plasma and plasma generated by laser and particle beams. The journal also publishes papers on such related topics as plasma electronics, generation of radiation in plasma, and plasma diagnostics. As well as other original communications, the journal publishes topical reviews and conference proceedings.
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