Microwave Surface and Lamb Waves in a Thin Diamond Plate: Experimental and Theoretical Investigation

IF 4.1 2区物理与天体物理 Q1 ACOUSTICS Ultrasonics Pub Date : 2025-05-01 Epub Date: 2025-01-16 DOI:10.1016/j.ultras.2025.107575

B.P. Sorokin , D.V. Yashin , N.O. Asafiev , S.I. Burkov , M.S. Kuznetsov , N.V. Luparev , A.V. Golovanov

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Abstract

Microwave surface and Lamb waves in a multilayered piezoelectric “Al-IDT/(Al_0.72Sc_0.28)N/(001)[110] diamond” structure designed as a SAW resonator were studied using both the experimental and modeling methods. In this structure, it is possible to generate Rayleigh, surface horizontal (SH_n) and Lamb waves simultaneously. The successful excitation of Lamb waves at operating frequencies up to 20 GHz has been obtained. We have developed a method for identifying mode types based on an analysis of the elastic displacement fields and the frequency dependences of the dispersive phase velocities of each wave, as the frequency increases. The experimental data on the frequency response is in close agreement with the calculated values. The influence of Pt film deposition on the shifts in the resonant frequency of Lamb wave modes has been studied in detail. Since the Pt film was deposited on the free surface of a diamond substrate, shifts in the resonant frequency of Rayleigh-type waves are absent, as expected. This serves as an additional indication to distinguish these types of waves from others. The effect of film deposition on the frequency response of Lamb waves could be taken into account when designing acoustoelectronic sensors that use this type of wave as an operational mode.

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金刚石薄板的微波表面和兰姆波：实验和理论研究。

采用实验和模型方法研究了多层压电“Al-IDT/(Al0.72Sc0.28)N/(001)[110]金刚石”结构作为SAW谐振器的微波表面波和Lamb波。在这种结构中，可以同时产生瑞利波、表面水平波和兰姆波。成功地激发了工作频率高达20 GHz的兰姆波。我们开发了一种识别模式类型的方法，该方法基于对弹性位移场的分析以及随着频率的增加，每个波的色散相速度的频率依赖性。频率响应的实验数据与计算值吻合较好。详细研究了铂薄膜沉积对兰姆波模式谐振频率位移的影响。由于铂薄膜沉积在金刚石衬底的自由表面上，所以瑞利型波的谐振频率没有变化，正如预期的那样。这是一个额外的指示，以区分这些类型的波与其他。在设计使用兰姆波作为工作模式的声电子传感器时，可以考虑薄膜沉积对兰姆波频率响应的影响。

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来源期刊

Ultrasonics 医学-核医学

CiteScore

7.60

自引率

19.00%

发文量

186

审稿时长

3.9 months

期刊介绍： Ultrasonics is the only internationally established journal which covers the entire field of ultrasound research and technology and all its many applications. Ultrasonics contains a variety of sections to keep readers fully informed and up-to-date on the whole spectrum of research and development throughout the world. Ultrasonics publishes papers of exceptional quality and of relevance to both academia and industry. Manuscripts in which ultrasonics is a central issue and not simply an incidental tool or minor issue, are welcomed. As well as top quality original research papers and review articles by world renowned experts, Ultrasonics also regularly features short communications, a calendar of forthcoming events and special issues dedicated to topical subjects.