Microwave Surface and Lamb Waves in a Thin Diamond Plate: Experimental and Theoretical Investigation

IF 3.8 2区物理与天体物理 Q1 ACOUSTICS Ultrasonics Pub Date : 2025-01-16 DOI:10.1016/j.ultras.2025.107575

B.P. Sorokin , D.V. Yashin , N.O. Asafiev , S.I. Burkov , M.S. Kuznetsov , N.V. Luparev , A.V. Golovanov

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Abstract

Microwave surface and Lamb waves in a multilayered piezoelectric “Al-IDT/(Al_0.72Sc_0.28)N/(001)[110] diamond” structure designed as a SAW resonator were studied using both the experimental and modeling methods. In this structure, it is possible to generate Rayleigh, surface horizontal (SH_n) and Lamb waves simultaneously. The successful excitation of Lamb waves at operating frequencies up to 20 GHz has been obtained. We have developed a method for identifying mode types based on an analysis of the elastic displacement fields and the frequency dependences of the dispersive phase velocities of each wave, as the frequency increases. The experimental data on the frequency response is in close agreement with the calculated values. The influence of Pt film deposition on the shifts in the resonant frequency of Lamb wave modes has been studied in detail. Since the Pt film was deposited on the free surface of a diamond substrate, shifts in the resonant frequency of Rayleigh-type waves are absent, as expected. This serves as an additional indication to distinguish these types of waves from others. The effect of film deposition on the frequency response of Lamb waves could be taken into account when designing acoustoelectronic sensors that use this type of wave as an operational mode.

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来源期刊

Ultrasonics 医学-核医学

CiteScore

7.60

自引率

19.00%

发文量

186

审稿时长

3.9 months

期刊介绍： Ultrasonics is the only internationally established journal which covers the entire field of ultrasound research and technology and all its many applications. Ultrasonics contains a variety of sections to keep readers fully informed and up-to-date on the whole spectrum of research and development throughout the world. Ultrasonics publishes papers of exceptional quality and of relevance to both academia and industry. Manuscripts in which ultrasonics is a central issue and not simply an incidental tool or minor issue, are welcomed. As well as top quality original research papers and review articles by world renowned experts, Ultrasonics also regularly features short communications, a calendar of forthcoming events and special issues dedicated to topical subjects.