Synthesis of UiO-66-NH2@PSF Hollow Fiber Membrane with Enhanced Simultaneous Adsorption of Pb2+ and Phosphate for Hydrogen Peroxide Purification

Abstract

Electronic grade hydrogen peroxide plays a crucial role in the fabrication of large-scale integrated circuits. However, hydrogen peroxide prepared by the anthraquinone method contains impurities such as lead ions (Pb²⁺) and phosphate, which can seriously affect the yield of the circuit. Traditional adsorbent materials have difficulty in solving the problem of simultaneous adsorption of trace anions and cations in hydrogen peroxide due to the single adsorption site and poor adsorption kinetics. In this study, UiO-66-NH₂ was prepared by introducing a –NH₂ group on the terephthalic acid ligand, and a series of hybrid matrix hollow fiber membranes with different UiO-66-NH₂ contents were prepared by loading it on polysulfone (PSF). This initiative not only improved the pore size and water flux of hollow fiber membranes but also enhanced the removal efficiency of ions from hydrogen peroxide solution, thereby facilitating practical application. Among them, UiO-66-NH₂@PSF-1.5 showed the best adsorption of phosphate and lead ions with adsorption capacities of 3.099 and 2.160 mg g^–1 and reached the removal efficiency of 67.1 and 60.1%, which fully confirms the practicability in the purification of electronic chemicals. This work innovatively proposes that UiO-66-NH₂@PSF hybrid matrix hollow fiber membranes have great potential as simultaneous adsorbents for cations and anions in the efficient purification of electronic grade solvents.