Akiko Ueda, Hiroyuki Akinaga, Sapan Agarwal, Joseph A Hagmann, Shamik Das, Matthew J Marinella, An Chen
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引用次数: 0
Abstract
Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The 'Beyond CMOS' chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of 'Green materials', emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of 'Green materials'. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.
期刊介绍：
The journal aims to publish papers at the forefront of nanoscale science and technology and especially those of an interdisciplinary nature. Here, nanotechnology is taken to include the ability to individually address, control, and modify structures, materials and devices with nanometre precision, and the synthesis of such structures into systems of micro- and macroscopic dimensions such as MEMS based devices. It encompasses the understanding of the fundamental physics, chemistry, biology and technology of nanometre-scale objects and how such objects can be used in the areas of computation, sensors, nanostructured materials and nano-biotechnology.
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