High-Speed and High-Resolution Polygon Mirror-Based Industrial Stereolithography With Advanced Active Error Compensation

IF 7.3 1区 工程技术 Q1 AUTOMATION & CONTROL SYSTEMS IEEE/ASME Transactions on Mechatronics Pub Date : 2025-01-30 DOI:10.1109/TMECH.2025.3527648
Bo Cong;Han Woong Yoo;Daniel Pechgraber;Georg Schitter
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Abstract

A high-speed and high-resolution polygon mirror (PM)-based industrial stereolithography apparatus (SLA) is designed and integrated with advanced active error compensation (AEC). The designed PM-based scanner provides extremely high laser beam scanning speeds but suffers from wobble errors caused by facet tilts, compromising its print quality. The advanced AEC is proposed to reduce the wobble error, where laser beams are deflected according to a precomputed compensation trajectory using a fast-steering mirror with iterative learning control. By exploiting the repetitiveness of the compensation trajectory, the advanced AEC yields a substantial 27-fold reduction in the wobble error and achieves a printing precision of $5 \,{\mu}\mathrm{m}$ in standard deviation, enabling the industrial SLA with $22 \,{\mu}\mathrm{m}$ optical resolution in a $460 \,\mathrm{m}\mathrm{m}$ print range with a print speed of $230 \,\mathrm{m}/\mathrm{s}$. The achieved printing performance is demonstrated by printed samples using photosensitive resin.
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基于高速高分辨率多边形镜的先进主动误差补偿工业立体光刻技术
设计了一种高速高分辨率的基于多边形反射镜的工业立体光刻设备,并集成了先进的主动误差补偿技术。设计的基于pm的扫描仪提供极高的激光束扫描速度,但受到facet倾斜引起的摆动误差的影响,从而影响其打印质量。采用迭代学习控制的快速转向反射镜使激光束按照预先计算的补偿轨迹偏转,从而减小了系统的摆动误差。通过利用补偿轨迹的重复性,先进的AEC使摆动误差减少了27倍,并实现了标准偏差为$5 \,{\mu}\mathrm{m}$的打印精度,使工业SLA在$460 \,\mathrm{m} $的打印范围内具有$22 \,{\mu}\mathrm{m}$的光学分辨率,打印速度为$230 \,\mathrm{m}/\mathrm{s}$。利用光敏树脂印刷样品,证明了所获得的印刷性能。
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来源期刊
IEEE/ASME Transactions on Mechatronics
IEEE/ASME Transactions on Mechatronics 工程技术-工程:电子与电气
CiteScore
11.60
自引率
18.80%
发文量
527
审稿时长
7.8 months
期刊介绍: IEEE/ASME Transactions on Mechatronics publishes high quality technical papers on technological advances in mechatronics. A primary purpose of the IEEE/ASME Transactions on Mechatronics is to have an archival publication which encompasses both theory and practice. Papers published in the IEEE/ASME Transactions on Mechatronics disclose significant new knowledge needed to implement intelligent mechatronics systems, from analysis and design through simulation and hardware and software implementation. The Transactions also contains a letters section dedicated to rapid publication of short correspondence items concerning new research results.
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