Ning Zhou , Qilong Guan , Shengli Li , Lin Wu , Xiaojiu Tang , Jian Guo , Chunjin Hang , Wei Zhang
{"title":"Thermal gradient-induced full intermetallic joints formation for chip bonding","authors":"Ning Zhou , Qilong Guan , Shengli Li , Lin Wu , Xiaojiu Tang , Jian Guo , Chunjin Hang , Wei Zhang","doi":"10.1016/j.intermet.2025.108647","DOIUrl":null,"url":null,"abstract":"<div><div>Solid-liquid interdiffusion bonding (SLID) acts as a promising stacking process for three-dimensional integrated circuit (3D IC) tacking, but nevertheless is plagued with low throughput. In this work, a new speed solid-liquid interdiffusion bonding process is proposed to improve the bonding reliability. Different from the homogeneous bonding temperature, a temperature gradient superposition is applied across the joint in the new process. Firstly, the new method is 5–7 times faster than that of the traditional bonding process, depending on the bonding temperatures and times. On the other hand, the asymmetric dissolution of Cu/Sn-3.0Ag-0.5Cu/Cu (Cu/SAC305/Cu) solder joints induced by large temperature gradient (0.1 °C/μm) leads the asymmetric growth of intermetallic compounds (IMCs) at the cold end. Besides, the morphologies of IMCs layer transforms from scallop-like grains to columnary grains at the cold end. In addition, the shear property of the solder joints obviously increases with the extension of the bonding times. The bonding mechanism of the solder joints is provided and experimentally confirmed in this work.</div></div>","PeriodicalId":331,"journal":{"name":"Intermetallics","volume":"178 ","pages":"Article 108647"},"PeriodicalIF":4.3000,"publicationDate":"2025-01-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Intermetallics","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0966979525000123","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, PHYSICAL","Score":null,"Total":0}
引用次数: 0
Abstract
Solid-liquid interdiffusion bonding (SLID) acts as a promising stacking process for three-dimensional integrated circuit (3D IC) tacking, but nevertheless is plagued with low throughput. In this work, a new speed solid-liquid interdiffusion bonding process is proposed to improve the bonding reliability. Different from the homogeneous bonding temperature, a temperature gradient superposition is applied across the joint in the new process. Firstly, the new method is 5–7 times faster than that of the traditional bonding process, depending on the bonding temperatures and times. On the other hand, the asymmetric dissolution of Cu/Sn-3.0Ag-0.5Cu/Cu (Cu/SAC305/Cu) solder joints induced by large temperature gradient (0.1 °C/μm) leads the asymmetric growth of intermetallic compounds (IMCs) at the cold end. Besides, the morphologies of IMCs layer transforms from scallop-like grains to columnary grains at the cold end. In addition, the shear property of the solder joints obviously increases with the extension of the bonding times. The bonding mechanism of the solder joints is provided and experimentally confirmed in this work.
期刊介绍:
This journal is a platform for publishing innovative research and overviews for advancing our understanding of the structure, property, and functionality of complex metallic alloys, including intermetallics, metallic glasses, and high entropy alloys.
The journal reports the science and engineering of metallic materials in the following aspects:
Theories and experiments which address the relationship between property and structure in all length scales.
Physical modeling and numerical simulations which provide a comprehensive understanding of experimental observations.
Stimulated methodologies to characterize the structure and chemistry of materials that correlate the properties.
Technological applications resulting from the understanding of property-structure relationship in materials.
Novel and cutting-edge results warranting rapid communication.
The journal also publishes special issues on selected topics and overviews by invitation only.