{"title":"Primary calibration method for laser Doppler vibrometers using electro-optical modulator","authors":"H. Nozato, W. Kokuyama, T. Shimoda, H. Inaba","doi":"10.1016/j.precisioneng.2024.12.015","DOIUrl":null,"url":null,"abstract":"<div><div>In this study, we propose a primary calibration method for laser Doppler vibrometers using an independent reference heterodyne laser interferometer and electro-optical modulator up to 1 MHz, and demonstrate its performance under the measurement uncertainties of velocity sensitivity and phase shift at different frequencies. To validate the proposed method, we compared its results with the comparison calibration results of a back-to-back accelerometer. Consequently, we confirmed the reliability of the proposed primary calibration method within the expanded uncertainty range.</div></div>","PeriodicalId":54589,"journal":{"name":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","volume":"93 ","pages":"Pages 204-215"},"PeriodicalIF":3.7000,"publicationDate":"2025-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0141635924002939","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2024/12/24 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"ENGINEERING, MANUFACTURING","Score":null,"Total":0}
引用次数: 0
Abstract
In this study, we propose a primary calibration method for laser Doppler vibrometers using an independent reference heterodyne laser interferometer and electro-optical modulator up to 1 MHz, and demonstrate its performance under the measurement uncertainties of velocity sensitivity and phase shift at different frequencies. To validate the proposed method, we compared its results with the comparison calibration results of a back-to-back accelerometer. Consequently, we confirmed the reliability of the proposed primary calibration method within the expanded uncertainty range.
期刊介绍：
Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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