{"title":"Low-Cost and Low-Voltage Si/SiGe Phototransistor With High Responsivity at 900nm for Microwave Photonics Applications","authors":"V. Thary;C. Algani;P. Chevalier;J.-L. Polleux","doi":"10.1109/LED.2024.3521117","DOIUrl":null,"url":null,"abstract":"This letter presents performances of Si/SiGe heterojunction bipolar phototransistors (HPT) used for microwave photonics communication receiver link around 850nm. SiGe phototransistors are designed in an industrial 55-nm SiGe BiCMOS from STMicroelectronics without any change in the layers technology process. Different horizontal geometries of HPTs and biasing techniques were evaluated. The static responsivity of a <inline-formula> <tex-math>$20\\times 20~ {\\mu }$ </tex-math></inline-formula>m2 optical window HPT reached 20.7 A/W at 900nm. This is the highest static responsivities reported for a fully-integrated Si/SiGe HPT with vertical illumination. A 1.6-GHz bandwidth for a 10.5-A/W static responsivity was achieved for a <inline-formula> <tex-math>$5\\times 5 {\\mu }$ </tex-math></inline-formula>m2 optical window HPT using current bias.","PeriodicalId":13198,"journal":{"name":"IEEE Electron Device Letters","volume":"46 2","pages":"239-242"},"PeriodicalIF":4.1000,"publicationDate":"2024-12-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=10811996","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Electron Device Letters","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/10811996/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
引用次数: 0
Abstract
This letter presents performances of Si/SiGe heterojunction bipolar phototransistors (HPT) used for microwave photonics communication receiver link around 850nm. SiGe phototransistors are designed in an industrial 55-nm SiGe BiCMOS from STMicroelectronics without any change in the layers technology process. Different horizontal geometries of HPTs and biasing techniques were evaluated. The static responsivity of a $20\times 20~ {\mu }$ m2 optical window HPT reached 20.7 A/W at 900nm. This is the highest static responsivities reported for a fully-integrated Si/SiGe HPT with vertical illumination. A 1.6-GHz bandwidth for a 10.5-A/W static responsivity was achieved for a $5\times 5 {\mu }$ m2 optical window HPT using current bias.
期刊介绍:
IEEE Electron Device Letters publishes original and significant contributions relating to the theory, modeling, design, performance and reliability of electron and ion integrated circuit devices and interconnects, involving insulators, metals, organic materials, micro-plasmas, semiconductors, quantum-effect structures, vacuum devices, and emerging materials with applications in bioelectronics, biomedical electronics, computation, communications, displays, microelectromechanics, imaging, micro-actuators, nanoelectronics, optoelectronics, photovoltaics, power ICs and micro-sensors.