Two-step growth procedure for homogeneous GaN NW arrays on graphene.

IF 2.8 4区 材料科学 Q3 MATERIALS SCIENCE, MULTIDISCIPLINARY Nanotechnology Pub Date : 2025-02-17 DOI:10.1088/1361-6528/adb3ad
Dyhia Tamsaout, Edmond Cambril, Laurent Travers, Ali Madouri, Noëlle Gogneau, Maria Tchernycheva, Jean-Christophe Harmand, Ludovic Largeau
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Abstract

Growth of GaN nanowires (NWs) on graphene substrates is carried out by plasma-assisted molecular beam epitaxy. We test a two-step growth procedure consisting of a first stage at relatively low temperature followed by a second stage at higher temperature. We investigate the impact of this process on the usually long incubation time which precedes the first GaN nucleation events on graphene. We also examine how the selectivity of growth between graphene and the surrounding SiO2surface is affected. After optimization of this procedure, it is applied to the growth of GaN NWs on a graphene layer patterned by electron beam lithography. A clear advantage of the two-step growth is observed in terms of reduction of the incubation time and improvement of height uniformity.

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石墨烯上均匀氮化镓NW阵列的两步生长方法。
利用等离子体辅助分子束外延技术在石墨烯衬底上生长GaN纳米线。我们测试了一个两步生长过程,包括在相对较低的温度下进行第一阶段,然后在较高的温度下进行第二阶段。我们研究了这一过程对石墨烯上第一次GaN成核事件之前通常较长的孵育时间的影响。我们还研究了石墨烯和周围SiO2表面之间生长的选择性是如何受到影响的。经过优化后,将其应用于电子束光刻成型法在石墨烯层上生长GaN纳米线。在减少培养时间和提高高度均匀性方面,观察到两步生长的明显优势。
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来源期刊
Nanotechnology
Nanotechnology 工程技术-材料科学:综合
CiteScore
7.10
自引率
5.70%
发文量
820
审稿时长
2.5 months
期刊介绍: The journal aims to publish papers at the forefront of nanoscale science and technology and especially those of an interdisciplinary nature. Here, nanotechnology is taken to include the ability to individually address, control, and modify structures, materials and devices with nanometre precision, and the synthesis of such structures into systems of micro- and macroscopic dimensions such as MEMS based devices. It encompasses the understanding of the fundamental physics, chemistry, biology and technology of nanometre-scale objects and how such objects can be used in the areas of computation, sensors, nanostructured materials and nano-biotechnology.
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