Design of a novel Z-shaped flexure hinge and a 2DOF XY precision positioning platform

Jinqiang Gan , Wenlong Xie , Wenjian Yang , Shihe Lei , Bo Lei
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Abstract

To solve the problem of inadequate amplification ratio within the precision positioning platforms, a novel Z-shaped flexure hinge (ZFH) is proposed firstly in this paper. Meanwhile, a 2DOF XY precision positioning platform which realizes secondary amplification with bridge-shaped mechanisms and novel ZFHs is designed. The novel ZFH and the platform are analyzed by static modeling with compliance matrix method and the principle of force equilibrium. The simulation results show that the errors in both stiffness and amplification ratios of the platform are within 7%, and the performance of novel ZFH is improved by 50.70%. Finally, A prototype of the platform is fabricated for performance testing. The experimental results well validate the superior performance of the platform and novel ZFH.
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新型z型柔性铰链及2DOF XY精密定位平台的设计
为解决精密定位平台内放大比不足的问题,本文首次提出了一种新型的z型柔性铰链。同时,设计了一种利用桥形机构和新型ZFHs实现二次放大的2DOF XY精密定位平台。采用柔度矩阵法和力平衡原理对新型ZFH和平台进行了静态建模分析。仿真结果表明,该平台的刚度和放大比误差均在7%以内,性能提高了50.70%。最后,制作了平台样机进行了性能测试。实验结果很好地验证了该平台和新型ZFH的优越性能。
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来源期刊
CiteScore
7.40
自引率
5.60%
发文量
177
审稿时长
46 days
期刊介绍: Precision Engineering - Journal of the International Societies for Precision Engineering and Nanotechnology is devoted to the multidisciplinary study and practice of high accuracy engineering, metrology, and manufacturing. The journal takes an integrated approach to all subjects related to research, design, manufacture, performance validation, and application of high precision machines, instruments, and components, including fundamental and applied research and development in manufacturing processes, fabrication technology, and advanced measurement science. The scope includes precision-engineered systems and supporting metrology over the full range of length scales, from atom-based nanotechnology and advanced lithographic technology to large-scale systems, including optical and radio telescopes and macrometrology.
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