Chengxiang Wang , Qingsong Li , Yulie Wu , Zhanqiang Hou , Xuezhong Wu , Dingbang Xiao
{"title":"MEMS friction vacuum gauge embedded in small vacuum chambers for vacuum and gas load measurement","authors":"Chengxiang Wang , Qingsong Li , Yulie Wu , Zhanqiang Hou , Xuezhong Wu , Dingbang Xiao","doi":"10.1016/j.vacuum.2025.114120","DOIUrl":null,"url":null,"abstract":"<div><div>—This study presents a microelectromechanical system (MEMS) friction gauge for vacuum pressure and gas load measurements of micro chambers. The gauge uses the squeeze film damping to realise high vacuum measurement, and the stability deviation was near 0.608 % over two months. The gauge was integrated into a low temperature co-fired ceramic metal tube (L-Tube in short) and a Kovar tube (K-tube) to measures the vacuum stability and the material outgassing of the laser welding processes. The L-Tube was observed to maintain a vacuum pressure of 1.5 × 10<sup>−2</sup> Pa for almost one year (336 days), with a gas load of approximately 1.08 × 10<sup>−6</sup> Pa cm<sup>3</sup>/s under atmospheric pressure. After laser welding, the K-tube with an encapsulated vacuum pressure of 1.45 × 10<sup>−2</sup> Pa with a leakage rate of 8.4 × 10<sup>−4</sup> Pa cm<sup>3</sup>/s.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"235 ","pages":"Article 114120"},"PeriodicalIF":3.8000,"publicationDate":"2025-02-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25001101","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
—This study presents a microelectromechanical system (MEMS) friction gauge for vacuum pressure and gas load measurements of micro chambers. The gauge uses the squeeze film damping to realise high vacuum measurement, and the stability deviation was near 0.608 % over two months. The gauge was integrated into a low temperature co-fired ceramic metal tube (L-Tube in short) and a Kovar tube (K-tube) to measures the vacuum stability and the material outgassing of the laser welding processes. The L-Tube was observed to maintain a vacuum pressure of 1.5 × 10−2 Pa for almost one year (336 days), with a gas load of approximately 1.08 × 10−6 Pa cm3/s under atmospheric pressure. After laser welding, the K-tube with an encapsulated vacuum pressure of 1.45 × 10−2 Pa with a leakage rate of 8.4 × 10−4 Pa cm3/s.
期刊介绍：
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
