{"title":"Miniaturized Plasmonic Sensor With Dual-Function Capability for Pressure and Flow Rate Detection at Subwavelength Levels","authors":"Rummanur Rahad;Joyonta Das Joy;Md. Shakibur Rahman;Md Jahidul Hoq Emon;Mohammad Ashraful Haque","doi":"10.1109/JSEN.2025.3525968","DOIUrl":null,"url":null,"abstract":"This article introduces a nanoscale plasmonic sensor with dual-function capabilities for detecting both pressure and flow rate, designed using a metal-insulator–metal (MIM) bus waveguide coupled with a resonator featuring a horizontal slot and multiple stubs. The sensor demonstrates high pressure sensitivity, achieving 1100.70 nm/MPa for pressure detection, with a figure of merit (FOM) of 4.6054, and effectively measures flow rates from 58.544 to 356.43 pL/s using an optical spectrum analyzer (OSA). Finite-element method (FEM) simulations were employed to analyze the pressure-induced wavelength shifts, enhancing the sensor’s versatility in integrated sensing applications. The sensor’s compact footprint, simplicity, and ease of fabrication make it ideal for integration into laboratory-on-a-chip devices. Its dual functionality provides a novel solution for precise, real-time monitoring in biomedical and microfluidic engineering applications.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 4","pages":"6176-6182"},"PeriodicalIF":4.3000,"publicationDate":"2025-01-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/10838329/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
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Abstract
This article introduces a nanoscale plasmonic sensor with dual-function capabilities for detecting both pressure and flow rate, designed using a metal-insulator–metal (MIM) bus waveguide coupled with a resonator featuring a horizontal slot and multiple stubs. The sensor demonstrates high pressure sensitivity, achieving 1100.70 nm/MPa for pressure detection, with a figure of merit (FOM) of 4.6054, and effectively measures flow rates from 58.544 to 356.43 pL/s using an optical spectrum analyzer (OSA). Finite-element method (FEM) simulations were employed to analyze the pressure-induced wavelength shifts, enhancing the sensor’s versatility in integrated sensing applications. The sensor’s compact footprint, simplicity, and ease of fabrication make it ideal for integration into laboratory-on-a-chip devices. Its dual functionality provides a novel solution for precise, real-time monitoring in biomedical and microfluidic engineering applications.
期刊介绍：
The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following:
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-Sensor Materials, Processing, and Fabrication
-Chemical and Gas Sensors
-Microfluidics and Biosensors
-Optical Sensors
-Physical Sensors: Temperature, Mechanical, Magnetic, and others
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-Sensors in Industrial Practice
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