{"title":"Extreme UV metalens consisting of ring meta-atoms","authors":"D. Zárate-Villegas, Ivan Moreno","doi":"10.1016/j.ijleo.2025.172258","DOIUrl":null,"url":null,"abstract":"<div><div>Designing lenses for wavelengths below 121 nm is challenging due to the strong absorption of optical materials. This study introduces a metalens composed of ring-shaped silica nano-elements that efficiently focus extreme ultraviolet (EUV) radiation. Each ring features an air or vacuum core (<span><math><mrow><mi>n</mi><mo>=</mo><mn>1</mn></mrow></math></span>) surrounded by silica with a refractive index <span><math><mrow><mi>n</mi><mo><</mo><mn>1</mn></mrow></math></span>, optimized for EUV operation. Finite-difference time-domain (FDTD) simulations demonstrate a phase coverage of 1.85 <span><math><mi>π</mi></math></span>, high EUV transmission, and an optical efficiency of 83.6%. These results represent a significant advancement over existing EUV metalenses, and underscore the potential of this design for compact and efficient EUV optical systems.</div></div>","PeriodicalId":19513,"journal":{"name":"Optik","volume":"326 ","pages":"Article 172258"},"PeriodicalIF":3.1000,"publicationDate":"2025-02-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optik","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0030402625000464","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"Engineering","Score":null,"Total":0}
引用次数: 0
Abstract
Designing lenses for wavelengths below 121 nm is challenging due to the strong absorption of optical materials. This study introduces a metalens composed of ring-shaped silica nano-elements that efficiently focus extreme ultraviolet (EUV) radiation. Each ring features an air or vacuum core () surrounded by silica with a refractive index , optimized for EUV operation. Finite-difference time-domain (FDTD) simulations demonstrate a phase coverage of 1.85 , high EUV transmission, and an optical efficiency of 83.6%. These results represent a significant advancement over existing EUV metalenses, and underscore the potential of this design for compact and efficient EUV optical systems.
期刊介绍：
Optik publishes articles on all subjects related to light and electron optics and offers a survey on the state of research and technical development within the following fields:
Optics:
-Optics design, geometrical and beam optics, wave optics-
Optical and micro-optical components, diffractive optics, devices and systems-
Photoelectric and optoelectronic devices-
Optical properties of materials, nonlinear optics, wave propagation and transmission in homogeneous and inhomogeneous materials-
Information optics, image formation and processing, holographic techniques, microscopes and spectrometer techniques, and image analysis-
Optical testing and measuring techniques-
Optical communication and computing-
Physiological optics-
As well as other related topics.
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