Vasilina Lapitskaya , Andrey Nikolaev , Anastasiya Khabarava , Evgeniy Sadyrin , Sergei Aizikovich , Aleksandr Komarov , Dmitry Orda , Aleksandra Cherniavskaya , Kamaludin Abdulvakhidov , Anaid Azoyan , Dmitry Kotov , Sergei Chizhik
{"title":"Microstructure and properties of thin AlN coatings with different stoichiometric compositions","authors":"Vasilina Lapitskaya , Andrey Nikolaev , Anastasiya Khabarava , Evgeniy Sadyrin , Sergei Aizikovich , Aleksandr Komarov , Dmitry Orda , Aleksandra Cherniavskaya , Kamaludin Abdulvakhidov , Anaid Azoyan , Dmitry Kotov , Sergei Chizhik","doi":"10.1016/j.materresbull.2025.113380","DOIUrl":null,"url":null,"abstract":"<div><div>The influence of the stoichiometric composition of thin AlN coatings on its microstructure, properties and specific electrical resistivity was studied. It was established that a sharp change occurs in the microstructure and properties when the nitrogen concentration in the coatings varies from 15 to 20 at.% N due to the changes in the phase composition of coatings. High mechanical properties (elastic modulus <em>E</em> and microhardness <em>H</em>) were obtained on Al<sub>0.87</sub>N<sub>0.13</sub> coating (<em>E</em> = 65 GPa, <em>H</em> = 1.1 GPa, group 1, at sputtering temperature 100 °C) and Al<sub>0.86</sub>N<sub>0.14</sub> coating (<em>E</em> = 65 GPa, <em>H</em> = 1.2 GPa, group 2, at sputtering temperature 20 °C). Low microtribological properties were obtained: in group 1 on an Al<sub>0.87</sub>N<sub>0.13</sub> coating and in group 2 – Al<sub>0.83</sub>N<sub>0.17</sub> coating. From the point of view of the optimal combination of microstructure and properties the most preferred AlN coatings for use in microelectronics are: from group 1 – Al<sub>0.87</sub>N<sub>0.13</sub> coating (<em>ρ</em>=0.168 μΩ·m), from group 2 – Al<sub>0.83</sub>N<sub>0.17</sub> coating (<em>ρ</em>=0.918 μΩ·m).</div></div>","PeriodicalId":18265,"journal":{"name":"Materials Research Bulletin","volume":"187 ","pages":"Article 113380"},"PeriodicalIF":5.7000,"publicationDate":"2025-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Materials Research Bulletin","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0025540825000881","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"2025/2/18 0:00:00","PubModel":"Epub","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
The influence of the stoichiometric composition of thin AlN coatings on its microstructure, properties and specific electrical resistivity was studied. It was established that a sharp change occurs in the microstructure and properties when the nitrogen concentration in the coatings varies from 15 to 20 at.% N due to the changes in the phase composition of coatings. High mechanical properties (elastic modulus E and microhardness H) were obtained on Al0.87N0.13 coating (E = 65 GPa, H = 1.1 GPa, group 1, at sputtering temperature 100 °C) and Al0.86N0.14 coating (E = 65 GPa, H = 1.2 GPa, group 2, at sputtering temperature 20 °C). Low microtribological properties were obtained: in group 1 on an Al0.87N0.13 coating and in group 2 – Al0.83N0.17 coating. From the point of view of the optimal combination of microstructure and properties the most preferred AlN coatings for use in microelectronics are: from group 1 – Al0.87N0.13 coating (ρ=0.168 μΩ·m), from group 2 – Al0.83N0.17 coating (ρ=0.918 μΩ·m).
期刊介绍：
Materials Research Bulletin is an international journal reporting high-impact research on processing-structure-property relationships in functional materials and nanomaterials with interesting electronic, magnetic, optical, thermal, mechanical or catalytic properties. Papers purely on thermodynamics or theoretical calculations (e.g., density functional theory) do not fall within the scope of the journal unless they also demonstrate a clear link to physical properties. Topics covered include functional materials (e.g., dielectrics, pyroelectrics, piezoelectrics, ferroelectrics, relaxors, thermoelectrics, etc.); electrochemistry and solid-state ionics (e.g., photovoltaics, batteries, sensors, and fuel cells); nanomaterials, graphene, and nanocomposites; luminescence and photocatalysis; crystal-structure and defect-structure analysis; novel electronics; non-crystalline solids; flexible electronics; protein-material interactions; and polymeric ion-exchange membranes.
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