On the choice of filters and their parameters in the determination of EEDF in gas discharge plasma from the current-voltage characteristic of the Langmuir probe

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2025-02-22 DOI:10.1016/j.vacuum.2025.114162

A.V. Bernatskiy , I.I. Draganov , N.A. Dyatko , I.V. Kochetov , V.V. Lagunov , V.N. Ochkin

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Abstract

In this paper, we analyze the possibility of measuring the electron energy distribution function (EEDF) in a discharge plasma in a wide energy range using a digital method for recording the current-voltage characteristic (IVC) of a Langmuir probe. The analysis is performed using the example of measurements in hollow cathode discharge plasma in helium. The distribution function is determined by double differentiation of the IVC using the Savitzky-Golay or Blackman smoothing filters. It is shown that the capabilities of these filters are comparable. In particular, none of them allows to correctly retrieve the EEDF in the entire energy range considered in the experiment with a fixed value of the parameters of each of the filters. A method for retrieving the EEDF with separate determination of its low-and high-energy parts and their subsequent stitching is proposed. To determine each part, specially selected filter parameter values are used. For the experimental conditions, criteria for selecting the values of filter parameters for the correct determination of the specified parts of the distribution function are proposed. The EEDF obtained in this way is compared with the theoretical one calculated for experimental conditions using the Monte Carlo technique.

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.