On the choice of filters and their parameters in the determination of EEDF in gas discharge plasma from the current-voltage characteristic of the Langmuir probe

IF 3.9 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Vacuum Pub Date : 2025-02-22 DOI:10.1016/j.vacuum.2025.114162

A.V. Bernatskiy , I.I. Draganov , N.A. Dyatko , I.V. Kochetov , V.V. Lagunov , V.N. Ochkin

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Abstract

In this paper, we analyze the possibility of measuring the electron energy distribution function (EEDF) in a discharge plasma in a wide energy range using a digital method for recording the current-voltage characteristic (IVC) of a Langmuir probe. The analysis is performed using the example of measurements in hollow cathode discharge plasma in helium. The distribution function is determined by double differentiation of the IVC using the Savitzky-Golay or Blackman smoothing filters. It is shown that the capabilities of these filters are comparable. In particular, none of them allows to correctly retrieve the EEDF in the entire energy range considered in the experiment with a fixed value of the parameters of each of the filters. A method for retrieving the EEDF with separate determination of its low-and high-energy parts and their subsequent stitching is proposed. To determine each part, specially selected filter parameter values are used. For the experimental conditions, criteria for selecting the values of filter parameters for the correct determination of the specified parts of the distribution function are proposed. The EEDF obtained in this way is compared with the theoretical one calculated for experimental conditions using the Monte Carlo technique.

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从Langmuir探针的电流-电压特性谈气体放电等离子体中EEDF测定滤波器的选择及其参数

本文分析了用记录朗缪尔探针电流-电压特性的数字方法测量放电等离子体宽能量范围内电子能量分布函数（EEDF）的可能性。以氦中空心阴极放电等离子体的测量为例进行了分析。分布函数通过使用Savitzky-Golay或Blackman平滑滤波器对IVC进行双重微分来确定。结果表明，这些滤波器的性能具有可比性。特别是，它们都不允许在每个滤波器的参数固定值的情况下正确检索实验中所考虑的整个能量范围内的EEDF。提出了一种分别确定其低能部分和高能部分及其后续拼接的提取EEDF的方法。为了确定每个部分，使用了专门选择的滤波器参数值。针对实验条件，提出了正确确定分布函数指定部分的滤波参数取值准则。用这种方法得到的EEDF与用蒙特卡罗技术在实验条件下计算的理论EEDF进行了比较。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.