Laser processing and grinding performance evaluation of CVD diamond micro tool

IF 5.1 3区 材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS Diamond and Related Materials Pub Date : 2025-04-01 Epub Date: 2025-02-22 DOI:10.1016/j.diamond.2025.112108
Jianfei Jia , Bing Guo , Wei Yang , Jun Qin , Guicheng Wu , Kenan Li , Jianhui Zhu , Zhongbo Zhang , Honghui Yao
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Abstract

Micro grinding is widespread in the biomedicine, aviation, as well as similar areas, and structure array has been used on the surface of micro tools to improve the grinding performance. In this study, a systematic research about laser processing and performance evaluation of different structured micro tools is carried out. First, adjustment measurements have been proposed to improve laser processing accuracy. Then, water assisted laser processing experiments were carried out to determine laser parameters and process structures on the micro tool. Fitting curve equations based on the scan parameters and the structure parameters have been established to reflect effects of laser parameters on the surface of micro tools. Finally, grinding experiments were performed to determine grinding parameters and evaluate the grinding performance of micro tools with different structures.

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CVD金刚石微刀具激光加工磨削性能评价
微磨削在生物医药、航空等领域有着广泛的应用,为了提高微刀具的磨削性能,在微刀具表面采用了结构阵列。本文对不同结构微刀具的激光加工及性能评价进行了系统的研究。首先,提出了调整措施,以提高激光加工精度。然后,进行了水辅助激光加工实验,确定了微刀具的激光参数和工艺结构。建立了基于扫描参数和结构参数的拟合曲线方程,以反映激光参数对微刀具表面的影响。最后进行了磨削实验,确定了不同结构微刀具的磨削参数,并对其磨削性能进行了评价。
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来源期刊
Diamond and Related Materials
Diamond and Related Materials 工程技术-材料科学:综合
CiteScore
6.00
自引率
14.60%
发文量
702
审稿时长
2.1 months
期刊介绍: DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.
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