Empowering TiO2:ZrO2 composite for energy storage through chemical beam vapor deposition

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Thin Solid Films Pub Date : 2025-02-23 DOI:10.1016/j.tsf.2025.140628

Md Kashif Shamim , William Maudez , Estelle Wagner , Seema Sharma , Radheshyam Rai , Giacomo Benvenuti , Rashmi Rani

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Abstract

Nanocomposite TiO₂:ZrO₂ thin films were deposited using the Chemical Beam Vapour Deposition technique with a combinatorial approach, allowing for rapid scanning of multiple parameters on a single substrate. The films were carefully studied for their structural, morphological, and dielectric properties with respect to different element compositions (∼80:20, ∼70:30, and ∼60:40 (Ti:Zr) atomic %). The X-ray diffraction measurements showed the presence of TiO₂ anatase phase, ZrO₂ tetragonal phase and ZrTiO₄ orthorhombic phase, which was further confirmed by Raman analysis. Atomic Force Microscopy and Field Emission Scanning Electron Microscopy revealed homogeneous morphology for all the composite films. Notably, the ∼60:40 (Ti:Zr) atomic %) nanocomposite thin film exhibited a high dielectric constant (up to ∼73), high ionic conductivity (up to 10^–1 S/cm), and low leakage current density (down to ∼4.4 × 10^–7 A/cm² at 1.2 V), making it an attractive material for energy storage applications in the future.

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通过化学束气相沉积增强TiO2:ZrO2复合材料的储能能力

采用化学束气相沉积技术和组合方法沉积纳米复合TiO2:ZrO2薄膜，允许在单个衬底上快速扫描多个参数。仔细研究了薄膜的结构、形态和介电性能与不同元素组成（~ 80:20、~ 70:30和~ 60:40 （Ti:Zr）原子百分比）的关系。x射线衍射结果表明，材料中存在TiO2锐钛矿相、ZrO2四方相和ZrTiO4正交相，拉曼分析进一步证实了这一点。原子力显微镜和场发射扫描电镜显示所有复合膜的形貌均匀。值得注意的是，该~ 60:40 （Ti:Zr）原子%)纳米复合薄膜具有高介电常数（高达~ 73）、高离子电导率（高达10-1 S/cm）和低漏电流密度（1.2 V时低至~ 4.4 × 10-7 a /cm2），使其成为未来储能应用的有吸引力的材料。

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.