Empowering TiO2:ZrO2 composite for energy storage through chemical beam vapor deposition

IF 2 4区材料科学 Q3 MATERIALS SCIENCE, COATINGS & FILMS Thin Solid Films Pub Date : 2025-02-23 DOI:10.1016/j.tsf.2025.140628

Md Kashif Shamim , William Maudez , Estelle Wagner , Seema Sharma , Radheshyam Rai , Giacomo Benvenuti , Rashmi Rani

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Abstract

Nanocomposite TiO₂:ZrO₂ thin films were deposited using the Chemical Beam Vapour Deposition technique with a combinatorial approach, allowing for rapid scanning of multiple parameters on a single substrate. The films were carefully studied for their structural, morphological, and dielectric properties with respect to different element compositions (∼80:20, ∼70:30, and ∼60:40 (Ti:Zr) atomic %). The X-ray diffraction measurements showed the presence of TiO₂ anatase phase, ZrO₂ tetragonal phase and ZrTiO₄ orthorhombic phase, which was further confirmed by Raman analysis. Atomic Force Microscopy and Field Emission Scanning Electron Microscopy revealed homogeneous morphology for all the composite films. Notably, the ∼60:40 (Ti:Zr) atomic %) nanocomposite thin film exhibited a high dielectric constant (up to ∼73), high ionic conductivity (up to 10^–1 S/cm), and low leakage current density (down to ∼4.4 × 10^–7 A/cm² at 1.2 V), making it an attractive material for energy storage applications in the future.

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来源期刊

Thin Solid Films 工程技术-材料科学：膜

CiteScore

4.00

自引率

4.80%

发文量

381

审稿时长

7.5 months

期刊介绍： Thin Solid Films is an international journal which serves scientists and engineers working in the fields of thin-film synthesis, characterization, and applications. The field of thin films, which can be defined as the confluence of materials science, surface science, and applied physics, has become an identifiable unified discipline of scientific endeavor.