A Low Detection Limit and High Sensitivity Three-Dimensional Structured X-Ray Detector

Abstract

A novel and highly sensitive X-ray detector with three-dimensional structured electrodes (3D-SiC) has been prepared on a high-resistivity silicon carbide substrate. The detector consistently demonstrates a low leakage current of 7.1 pA and 280 pA with the bias of 200 V at room temperature and 150°C, respectively. In the X-ray response test, the 3D-SiC detector exhibits high sensitivity of ${5}.{65}\times {10} ^{{4}}~\mu $ C $\cdot $ Gy $_{\text {air}}^{-{1}}\cdot $ cm $^{-{2}}$ . Meanwhile, it exhibits a linear response to dose rates ranging from 0.67 to $3.02~\mu $ Gy $_{\text {air}}\cdot $ s $^{-{1}}$ . So, the detection limit could be calculated as low as 6.92 nGy $_{\text {air}}\cdot $ s $^{-{1}}$ . Comparing with planar semiconductor-based X-ray detectors, 3D-SiC detector shows ultra-high sensitivity with extremely low detection limit at room temperature. This characteristic renders it potentially advantageous in domains characterized by limited X-ray detection and imaging capabilities, such as the field of X-ray medical diagnosis.