A lightweight resonance tracking system for piezoresistive microcantilever sensors

IF 4 Q2 NANOSCIENCE & NANOTECHNOLOGY Micro and Nano Systems Letters Pub Date : 2025-02-26 DOI:10.1186/s40486-025-00221-9

Andi Setiono, Nelfyenny, Suryadi, Qomaruddin, Wilson Ombati Nyang’au, Erwin Peiner

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Abstract

A lightweight resonance tracking system designed for precise monitoring of resonant frequency shifts in microcantilever sensors is introduced. The system integrates a Phase-Locked Loop (PLL)-based technique with a Python-based interface for real-time control and visualization. A tipless microcantilever sensor was tested under relative humidity (RH) conditions ranging from 63% to 90% to experimentally validate the system. The system demonstrated a sensitivity of 1.082 Hz/% RH and a Limit of Detection (LOD) of 1.89% RH. The silicon dioxide (\(SiO_2\)) surface of the microcantilever is hygroscopic, allowing water vapor adsorption and causing frequency shifts. This effect is more pronounced at high humidity levels (>80% RH) due to multilayer adsorption. These results confirm the reliability and precision of the system in detecting environmental changes. The findings highlight the potential of the developed system for applications in environmental monitoring, healthcare diagnostics, and industrial chemical sensing.

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压阻式微悬臂传感器的轻量化共振跟踪系统

介绍了一种用于精确监测微悬臂传感器谐振频移的轻量化谐振跟踪系统。该系统集成了基于锁相环（PLL）的技术和基于python的接口，用于实时控制和可视化。在相对湿度（RH）为63% to 90% to experimentally validate the system. The system demonstrated a sensitivity of 1.082 Hz/% RH and a Limit of Detection (LOD) of 1.89% RH. The silicon dioxide (\(SiO_2\)) surface of the microcantilever is hygroscopic, allowing water vapor adsorption and causing frequency shifts. This effect is more pronounced at high humidity levels (>80% RH) due to multilayer adsorption. These results confirm the reliability and precision of the system in detecting environmental changes. The findings highlight the potential of the developed system for applications in environmental monitoring, healthcare diagnostics, and industrial chemical sensing.

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