Product quality research in the industrialized preparation of electronic grade polysilicon: A review of impurity sources and control strategies

Abstract

Electronic-grade polysilicon is a critical raw material for the high-performance semiconductor industry, requiring extremely high purity levels. The control of impurity content during the production process has a decisive impact on the quality and performance of the final product. The development and improvement of production processes to achieve precise control of impurity content is the core challenge for the industrialized preparation of electronic-grade polysilicon. Based on a brief introduction of the main production processes, this review systematically reviews the impurity sources and effective control strategies in the production of electronic-grade polysilicon based on the modified Siemens process, including the synthesis of raw materials, the distillation and purification of trichlorosilane, the reduction of trichlorosilane, and the separation and recycling of tail gas. Finally, the technical challenges faced in the current production process are pointed out, and look forward to further directions for improving production efficiency and optimizing impurity control in the industrialized preparation of electronic-grade polysilicon. The advancement of new processes, improvement of impurity control strategies, optimization of existing production techniques and equipment, upgrading of resource recycling systems, and the development of intelligent control and automated production technology will be essential drivers for the continued advancement of electronic-grade polysilicon production technology.