Radial image processing for phase extraction in rough-surface interferometry

IF 5.6 2区 工程技术 Q1 ENGINEERING, MULTIDISCIPLINARY Measurement Pub Date : 2025-03-04 DOI:10.1016/j.measurement.2025.117102
Dawid Kucharski, Michał Wieczorowski
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Abstract

This paper presents a newly developed phase extraction algorithm to determine surface displacements and accurately estimate surface roughness parameters. The algorithm utilises radial image processing to extract the phase from the central region of an interferogram with circular fringes obtained from a self-built Michelson-type interferometer with a single rough surface. A key advantage of the method lies in its ability to leverage the entire image for phase extraction, even when the fringes are fragmented, or the central region is unclear. The linear relationship between the extracted phase and the object’s displacement eliminates ambiguities associated with intensity measurements near maximum or minimum values while reliably indicating the direction of motion. Furthermore, the algorithm effectively addresses speckle interference challenges, common in industrial applications where lasers are the primary light source. The proposed setup, combined with the advanced image processing algorithm, achieves displacement measurements with sub-micrometre precision, offering a robust tool for analysing rough surfaces in industrial environments.
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粗糙表面干涉测量中相位提取的径向图像处理
本文提出了一种新的相位提取算法,用于确定表面位移和准确估计表面粗糙度参数。该算法利用径向图像处理技术,从自制的单面粗糙迈克尔逊型干涉仪获得的圆形条纹干涉图的中心区域提取相位。该方法的一个关键优势在于它能够利用整个图像进行相位提取,即使在条纹破碎或中心区域不清楚的情况下也是如此。提取的相位和物体位移之间的线性关系消除了与接近最大值或最小值的强度测量相关的模糊性,同时可靠地指示运动方向。此外,该算法有效地解决了在激光作为主要光源的工业应用中常见的散斑干扰挑战。该装置与先进的图像处理算法相结合,实现了亚微米精度的位移测量,为分析工业环境中的粗糙表面提供了强大的工具。
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来源期刊
Measurement
Measurement 工程技术-工程:综合
CiteScore
10.20
自引率
12.50%
发文量
1589
审稿时长
12.1 months
期刊介绍: Contributions are invited on novel achievements in all fields of measurement and instrumentation science and technology. Authors are encouraged to submit novel material, whose ultimate goal is an advancement in the state of the art of: measurement and metrology fundamentals, sensors, measurement instruments, measurement and estimation techniques, measurement data processing and fusion algorithms, evaluation procedures and methodologies for plants and industrial processes, performance analysis of systems, processes and algorithms, mathematical models for measurement-oriented purposes, distributed measurement systems in a connected world.
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