Parallel direct laser writing method based on optical fiber array

Abstract

Direct laser writing (DLW) technology has been widely used in various fields, and parallelization via multi-foci generation has been an effective approach to improve manufacturing efficiency. However, the present technologies make it difficult to achieve high throughput while maintaining high precision and consistency. This paper proposes a high-throughput nano-scale DLW technology based on an optical fiber array, which has the capability for parallel writing through multiple channels that can be independently controlled and has validated the possibility of 60-channel writing. The beam-combining technology based on fibers allows the error range between channels to be reduced to within 20 nm. By modulating the energy of the parallel channels, the technology achieves sub-40 nm precision while increasing throughput. This technology supports the writing of large-area structures and non-periodic patterns and is expected to solve the problem of parallel high-throughput writing with high precision.