Fused Silica Container Material with Al2O3 Nanofiber Additions for Semiconductor Technologies

Abstract

We have studied the effect of Al₂O₃ nanofiber on the properties of fused silica ceramics such as are used to produce containers for molten semiconductor materials. The addition of 0.05 to 0.15 wt % alumina nanofiber has been shown to cause an increase in the mechanical strength of ceramics prepared via slip casting. The addition of 0.15 wt % nanofiber increased the compressive strength of the ceramic material obtained at a sintering temperature of 1200°C from 90 ± 4 to 143 ± 9 MPa and its bending strength from 28 ± 2 to 42 ± 3 MPa.