Deposition of silver and titanium co-doped diamond-like carbon films by magnetron sputtering

IF 5.1 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS Diamond and Related Materials Pub Date : 2025-03-12 DOI:10.1016/j.diamond.2025.112200

Oskars Platnieks , Hassan Zhairabany , Hesam Khaksar , Enrico Gnecco , Sergejs Gaidukovs , Edgars Vanags , Anatolijs Sarakovskis , Liutauras Marcinauskas

{"title":"Deposition of silver and titanium co-doped diamond-like carbon films by magnetron sputtering","authors":"Oskars Platnieks , Hassan Zhairabany , Hesam Khaksar , Enrico Gnecco , Sergejs Gaidukovs , Edgars Vanags , Anatolijs Sarakovskis , Liutauras Marcinauskas","doi":"10.1016/j.diamond.2025.112200","DOIUrl":null,"url":null,"abstract":"<div><div>The aim of this study was to investigate the effects of silver and titanium co-doping on the microstructure and properties of non‑hydrogenated diamond-like carbon (DLC) films deposited via direct current magnetron sputtering. Doping levels were controlled by varying the shield opening above a silver‑titanium (50/50 at.%) target. The films were characterized using energy-dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy, nanoindentation, and surface wetting. Co-doped metal content ranged from 2.0 at.% and 0.3 at.% to 8.2 at.% and 2.9 at.% for Ag and Ti, respectively (XPS data). Moderate doping improved hardness and elastic modulus, while higher levels induced graphitization of the doped-DLC films. Tunable friction coefficients and wettability were observed, suggesting potential applications in wear-resistant and biocompatible coatings. XPS analysis revealed the formation of carbon oxide and titanium oxide bonds with no pronounced existence of titanium carbide in the doped films. Increasing Ag and Ti content enhanced the surface roughness and promoted cluster formation in the films. This study provides valuable insights into the synergistic effects of Ag and Ti in DLC films, highlighting their versatility for advanced functional coatings.</div></div>","PeriodicalId":11266,"journal":{"name":"Diamond and Related Materials","volume":"154 ","pages":"Article 112200"},"PeriodicalIF":5.1000,"publicationDate":"2025-03-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Diamond and Related Materials","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0925963525002572","RegionNum":3,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, COATINGS & FILMS","Score":null,"Total":0}

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Abstract

The aim of this study was to investigate the effects of silver and titanium co-doping on the microstructure and properties of non‑hydrogenated diamond-like carbon (DLC) films deposited via direct current magnetron sputtering. Doping levels were controlled by varying the shield opening above a silver‑titanium (50/50 at.%) target. The films were characterized using energy-dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy (XPS), Raman spectroscopy, atomic force microscopy, nanoindentation, and surface wetting. Co-doped metal content ranged from 2.0 at.% and 0.3 at.% to 8.2 at.% and 2.9 at.% for Ag and Ti, respectively (XPS data). Moderate doping improved hardness and elastic modulus, while higher levels induced graphitization of the doped-DLC films. Tunable friction coefficients and wettability were observed, suggesting potential applications in wear-resistant and biocompatible coatings. XPS analysis revealed the formation of carbon oxide and titanium oxide bonds with no pronounced existence of titanium carbide in the doped films. Increasing Ag and Ti content enhanced the surface roughness and promoted cluster formation in the films. This study provides valuable insights into the synergistic effects of Ag and Ti in DLC films, highlighting their versatility for advanced functional coatings.

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磁控溅射法沉积银和钛共掺杂类金刚石碳薄膜

本研究的目的是研究银和钛共掺杂对直流磁控溅射沉积非氢化类金刚石（DLC）薄膜的微观结构和性能的影响。通过改变银钛（50/50 at.%）靶上的屏蔽开口来控制掺杂水平。利用能量色散x射线能谱、x射线光电子能谱（XPS）、拉曼光谱、原子力显微镜、纳米压痕和表面润湿等方法对膜进行了表征。共掺杂金属含量从2.0 at。%和0.3 at。%至8.2%。%和2.9%。%为Ag和Ti （XPS数据）。适度的掺杂提高了dlc薄膜的硬度和弹性模量，而高水平的掺杂诱导了dlc薄膜的石墨化。观察到可调节的摩擦系数和润湿性，表明在耐磨和生物相容性涂层中的潜在应用。XPS分析表明，掺杂薄膜中形成了氧化碳和氧化钛键，没有明显的碳化钛存在。Ag和Ti含量的增加提高了薄膜的表面粗糙度，促进了薄膜中团簇的形成。这项研究为银和钛在DLC薄膜中的协同效应提供了有价值的见解，突出了它们在高级功能涂层中的多功能性。

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.