Comparative study of lithium niobate thin films-based surface acoustic wave resonators including temperature characterization

IF 3.6 2区物理与天体物理 Q2 PHYSICS, APPLIED Applied Physics Letters Pub Date : 2025-03-17 DOI:10.1063/5.0244876

Luyao Liu, Shuxian Wu, Ting Wu, Feihong Bao, Feifei Wang, Xiangyong Zhao, Qiaozhen Zhang, Jie Zou

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Abstract

This Letter presents a comparative study of surface acoustic wave (SAW) resonators on two different piezo-on-insulator (POI) substrates, 30° YX-LiNbO3/SiO2/sapphire and 30° YX-LiNbO3/SiO2/poly-Si/Si. The dispersion relationships between the resonant frequencies and wavelengths for the resonators, including the shear horizontal (SH) and Rayleigh modes, are investigated. The theoretical and experimental results showed that the main SH mode provides a larger coupling coefficient (K2) and that the spurious Rayleigh mode can be shifted from the passband and away from the main SH mode. Although the proposed POI SAW resonators on two different substrates have comparable frequencies for the same wavelength, the sapphire-based substrate exhibits a larger K2 of 28% and a higher fitted Bode-Qmax of 977 at 1.4 GHz. The temperature behavior of the SAW resonators is measured over a temperature range from −25 to 250 °C. The findings indicated that the resonator with the Si-based substrate has better temperature stability, with a temperature coefficient of frequency (TCF) of −16.99 ppm/°C and a turning point at 150 °C. In contrast, the one with the sapphire-based substrate provides a moderate TCF of −22.15 ppm/°C and remains linear for temperatures above 200 °C. This study reveals the impact of different substrate structures on the performance of SAW resonators, providing guidance for the design of desired SAW devices and their applications.

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铌酸锂薄膜表面声波谐振器的温度表征比较研究

本文介绍了在30°YX-LiNbO3/SiO2/蓝宝石和30°YX-LiNbO3/SiO2/poly-Si/Si两种不同压电绝缘体（POI）衬底上表面声波（SAW）谐振器的比较研究。研究了包括剪切水平模式和瑞利模式在内的谐振腔谐振频率与波长之间的色散关系。理论和实验结果表明，主SH模式提供了更大的耦合系数（K2），并且伪瑞利模式可以从通带移出并远离主SH模式。尽管两种不同衬底上的POI SAW谐振器在相同波长下具有相似的频率，但蓝宝石衬底在1.4 GHz时具有较大的K2（28%）和较高的拟合Bode-Qmax（977）。SAW谐振器的温度行为在- 25至250°C的温度范围内测量。结果表明，硅基衬底谐振腔具有较好的温度稳定性，频率温度系数（TCF）为- 16.99 ppm/°C，转折点在150°C。相比之下，蓝宝石衬底的TCF为- 22.15 ppm/°C，并且在200°C以上的温度下保持线性。本研究揭示了不同衬底结构对声表面波谐振器性能的影响，为理想声表面波器件的设计及其应用提供指导。

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.