Esa Alakoski, Sami Kinnunen, Girish C. Tewari, Jaakko Julin, Antti J. Soininen, Maarit Karppinen
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引用次数: 0
Abstract
Thin films are an effective way of manufacturing thermoelectric (TE) sensors for biomedical devices and wearable electronics. Excellent conformality and sub-nanometer thickness control of atomic layer deposition (ALD) make it a promising method of preparing TE thin films on flexible polymer and textile substrates suitable for sensor use. Here, Al-doped ZnO films were deposited on flexible perforated polyethylene terephthalate (PET) templates with 50/1 diethylzinc/trimethylaluminum pulsing ratio at a low temperature of 100 °C. Thermoelectric properties of the resulting nanocomposites were measured. The application potential of the present ALD-made TE coatings on flexible PET films for future roll-to-roll fabrication is discussed.
期刊介绍：
Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology.
In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics.
APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field.
Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.
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