Fabrication of micro-nano stacked metal structures via surface plasmon excitation in Au-AAO-Au arrays

Abstract

Additive manufacturing has seen significant advancements at macroscopic scales, but challenges remain in developing effective methods for microscopic-scale production. In this study, we explore the use of surface plasmons to enhance light transmission in subwavelength periodic hole arrays, utilizing a metal-insulator-metal (MIM) type film. Experiments were conducted to fabricate micro-nano stacked metal structures by exciting surface plasmons on the metal surface, with single crystal silicon serving as the substrate. The results demonstrate that this MIM structure can successfully induce surface plasmons, leading to the formation of numerous micro-nano sized metal stacked structures on the silicon surface. This approach highlights the potential of micro-nano additive manufacturing using surface plasmon excitation. In certain specialized biosensing applications, such as microcantilever sensors, the fabrication of micro-nano stacked structures via surface plasmon excitation can increase the specific surface area without altering the chemical or physical properties. This enhancement significantly improves detection sensitivity.