Low-temperature growth of epitaxial BaTiO3 thin films with significant electro-optic coefficients

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED Applied Physics Letters Pub Date : 2025-03-20 DOI:10.1063/5.0237644

Yilin Cao, Yiyang Wen, Yongtao Yang, Fan Zhang, Wenjia Zhang, Jiangbing Du, Yang Zhang, Zhenping Wu, Jian Wu

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引用次数: 0

Abstract

Barium titanate (BaTiO3, BTO) thin films, with their exceptionally high Pockels coefficients, present a promising alternative to lithium niobate (LiNbO3, LN) for integrated photonic devices. BTO's compatibility with complementary metal–oxide–semiconductor (CMOS) technology further enhances its appeal, contingent on the development of low-temperature growth processes. This study investigates the impact of growth temperature on the electro-optic (EO) performance of BTO films, revealing a clear correlation between lower growth temperatures and reduced EO coefficients. Notably, BTO films grown at 400 °C maintain significant EO coefficients of approximately 51.6 pm/V. These findings underscore the potential of low-temperature grown BTO films for high-performance EO applications. By elucidating the relationship between growth temperature, crystallinity, and EO performance, this research provides critical guidelines for fabricating high-performing BTO films compatible with CMOS technology, facilitating the advancement of next-generation photonic devices.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.