Scanning Mirror Benchmarking Platform Based on Two-Dimensional Position Sensitive Detector and Its Accuracy Analysis.

IF 3 3区工程技术 Q2 CHEMISTRY, ANALYTICAL Micromachines Pub Date : 2025-03-19 DOI:10.3390/mi16030348

Hexiang Guo, Junya Wang, Zheng You

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Abstract

A MEMS scanning mirror is a beam scanning device based on MEMS technology, which plays an important role in the fields of Lidar, medical imaging, laser projection display, and so on. The accurate measurement of the scanning mirror index can verify its performance and application scenarios. This paper designed and built a scanning mirror benchmark platform based on a two-dimensional position-sensitive detector (PSD), which can accurately measure the deflection angle, resonance frequency, and angular resolution of the scanning mirror, and described the specific test steps of the scanning mirror parameters, which can meet the two-dimensional measurement. Secondly, this paper analyzed and calculated the angular test uncertainty of the designed test system. After considering the actual optical alignment error and PSD measurement error, when the distance between the PSD and MEMS scanning mirror is 100 mm, the range of mechanical deflection angle that can be measured is (-6.34°, +6.34°). When the mechanical deflection angle of the scanning mirror is 0.01°, the accuracy measured by the test system is 0.00097°, and when the mechanical deflection of the scanning mirror is 6.34°, the accuracy measured by the test system is 0.011°. The test platform has high accuracy and can measure the parameters of the scanning mirror accurately.

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基于二维位置敏感探测器的扫描镜基准平台及其精度分析。

MEMS扫描镜是一种基于MEMS技术的光束扫描器件，在激光雷达、医学成像、激光投影显示等领域发挥着重要作用。扫描镜折射率的精确测量可以验证其性能和应用场景。本文设计并搭建了基于二维位置敏感探测器（PSD）的扫描镜基准平台，能够精确测量扫描镜的偏转角度、共振频率和角分辨率，并描述了扫描镜参数的具体测试步骤，能够满足二维测量。其次，对所设计测试系统的角度测试不确定度进行了分析计算。综合考虑实际光学对准误差和PSD测量误差，当PSD与MEMS扫描镜之间的距离为100 mm时，可测量的机械偏转角范围为（-6.34°，+6.34°）。当扫描镜的机械偏转角度为0.01°时，测试系统测得的精度为0.00097°，当扫描镜的机械偏转角度为6.34°时，测试系统测得的精度为0.011°。测试平台精度高，能准确测量扫描镜的参数。

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来源期刊

Micromachines NANOSCIENCE & NANOTECHNOLOGY-INSTRUMENTS & INSTRUMENTATION

CiteScore

5.20

自引率

14.70%

发文量

1862

审稿时长

16.31 days

期刊介绍： Micromachines (ISSN 2072-666X) is an international, peer-reviewed open access journal which provides an advanced forum for studies related to micro-scaled machines and micromachinery. It publishes reviews, regular research papers and short communications. Our aim is to encourage scientists to publish their experimental and theoretical results in as much detail as possible. There is no restriction on the length of the papers. The full experimental details must be provided so that the results can be reproduced.