Enrichment of semiconducting single-wall carbon nanotubes by etching energy barrier engineering

IF 14.3 1区 材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY Journal of Materials Science & Technology Pub Date : 2025-03-28 DOI:10.1016/j.jmst.2025.02.036
Jia-Yang Zhang, Lingtong Ding, Meng-Ke Zou, Lili Zhang, Xin Li, Zhong-Hai Ji, Xiao Wang, Chang Liu
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Abstract

Horizontally aligned semiconducting single-wall carbon nanotube (s-SWCNT) arrays are ideal candidates for next-generation integrated circuits. However, the mainstream synthesis methods for obtaining s-SWCNTs mainly utilize the differences in structure and chemical reactivity between them and their metallic counterparts. These differences are too small to greatly improve their purity and reproducibility. Here we report an energy engineering strategy to expand the etching energy barrier difference of SWCNTs with different conductivities. In addition to density functional theory calculations on the energy barrier change, hydrogenation of single-wall carbon nanotubes (SWCNTs) by hydrogen plasma treatment and reversible dehydrogenation by annealing were realized experimentally. The structure-dependent hydrogenation and following selective oxidative etching of SWCNTs were demonstrated. As a result, horizontally aligned s-SWCNT arrays with high purity were obtained.

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蚀刻能垒工程富集半导体单壁碳纳米管
水平排列的半导体单壁碳纳米管(s-SWCNT)阵列是下一代集成电路的理想候选材料。然而,目前获得 s-SWCNTs 的主流合成方法主要是利用它们与其金属对应物之间在结构和化学反应活性上的差异。这些差异太小,无法大大提高其纯度和可重复性。在此,我们报告了一种扩大不同导电率的 SWCNTs 蚀刻能垒差的能量工程策略。除了能垒变化的密度泛函理论计算,我们还通过实验实现了氢等离子体处理单壁碳纳米管(SWCNT)的氢化和退火的可逆脱氢。实验证明了 SWCNT 的氢化和随后的选择性氧化蚀刻与结构有关。因此,获得了高纯度水平排列的 s-SWCNT 阵列。
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来源期刊
Journal of Materials Science & Technology
Journal of Materials Science & Technology 工程技术-材料科学:综合
CiteScore
20.00
自引率
11.00%
发文量
995
审稿时长
13 days
期刊介绍: Journal of Materials Science & Technology strives to promote global collaboration in the field of materials science and technology. It primarily publishes original research papers, invited review articles, letters, research notes, and summaries of scientific achievements. The journal covers a wide range of materials science and technology topics, including metallic materials, inorganic nonmetallic materials, and composite materials.
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