Ex-situ observation of microstructure evolution and electrical resistance transition in micro joints under electron current stressing

IF 6.1 2区 材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS Surface & Coatings Technology Pub Date : 2025-04-03 DOI:10.1016/j.surfcoat.2025.132124
Yi-An Wu , Zhao-Yu Yang , Pei-Chia Hsu , Chih-Ming Chen , Yu-An Shen , Cheng-En Ho
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Abstract

Micro joint fabrication is a prevalent technology for microelectronic industry and the joint electrical and mechanical integrities significantly impact the electronic package reliability. In this study, the transitions in electrical resistance and crystallographic characteristics (grain orientation and size) of micro joints upon electron current stressing was characterized using an ohmmeter and an electron backscatter diffraction analysis system equipped in a field-emission scanning electron microscope. A significant decrease (approximately 7 %) in the joint electrical resistance accompanied with β-Sn grain reorientation and grain boundary elimination was induced in a few hours of the current stressing test. Mayadas-Shatzkes (M-S) model was employed to evaluate the contribution of grain boundary characteristics to the resistance drop, and revealed that approximately 85 % resistance drop was caused by the Sn grain reorientation and the remaining part (approximately 15 %) was by the grain boundary elimination. This quantitative analysis advanced the fundamental understanding of micro-joint characteristics in electrical transition induced by electromigration. Finally, a mitigation strategy of electromigration-induced β-Sn crystallographic and electrical transitions was proposed in this study.
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电流应力作用下微接头组织演化及电阻转变的原位观察
微接头制造是微电子工业的一种流行技术,接头的电气和机械完整性对电子封装的可靠性有重要影响。在本研究中,利用配备在场发射扫描电镜中的欧姆计和电子背散射衍射分析系统,表征了微接头在电流应力作用下的电阻和晶体学特征(晶粒取向和尺寸)的变化。在电流应力试验的几个小时内,接头电阻显著降低(约7%),同时伴有β-Sn晶粒重取向和晶界消除。采用Mayadas-Shatzkes (M-S)模型评价了晶界特征对电阻下降的贡献,结果表明,约85%的电阻下降是由Sn晶粒重取向引起的,其余部分(约15%)是由晶界消除引起的。这一定量分析促进了对电迁移引起的电跃迁微接头特征的基本认识。最后,本研究提出了一种减缓电迁移诱导的β-Sn晶体和电跃迁的策略。
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来源期刊
Surface & Coatings Technology
Surface & Coatings Technology 工程技术-材料科学:膜
CiteScore
10.00
自引率
11.10%
发文量
921
审稿时长
19 days
期刊介绍: Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.
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