Zhun Gu, Kaitong Yang, Hayford Boamah, Dong Chen, Zhiqiang Zhu and Jie Wang
{"title":"Real-time monitoring of photodegradation in photoresists using a quartz crystal microbalance†","authors":"Zhun Gu, Kaitong Yang, Hayford Boamah, Dong Chen, Zhiqiang Zhu and Jie Wang","doi":"10.1039/D4RA05762G","DOIUrl":null,"url":null,"abstract":"<p >We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.</p>","PeriodicalId":102,"journal":{"name":"RSC Advances","volume":" 16","pages":" 12304-12308"},"PeriodicalIF":4.6000,"publicationDate":"2025-04-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.rsc.org/en/content/articlepdf/2025/ra/d4ra05762g?page=search","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"RSC Advances","FirstCategoryId":"92","ListUrlMain":"https://pubs.rsc.org/en/content/articlelanding/2025/ra/d4ra05762g","RegionNum":3,"RegionCategory":"化学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"CHEMISTRY, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0
Abstract
We report a quantitative method for the real-time evaluation of photoresist performance that integrates laser irradiation with quartz crystal microbalance (QCM) sensing technology. The results obtained for the model photoresist AZ1518 correlated with the traditionally obtained ones. Furthermore, the system revealed viscoelastic transitions and shear stress evolution during photoreactions.
期刊介绍：
An international, peer-reviewed journal covering all of the chemical sciences, including multidisciplinary and emerging areas. RSC Advances is a gold open access journal allowing researchers free access to research articles, and offering an affordable open access publishing option for authors around the world.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
