Millimeter-Sized Single-Crystalline Anatase Nb-Doped TiO2 Membranes Exhibiting High Electrical Conduction and Transparency

IF 4.7 3区材料科学 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC ACS Applied Electronic Materials Pub Date : 2025-04-02 DOI:10.1021/acsaelm.4c02342

Yuzuki Uchida, Jiyang Huang, Masamichi Negishi, Seung Sae Hong and Tomoteru Fukumura*,

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Abstract

Nb-doped TiO₂ (TNO) is a transparent conducting electrode, contributing to transparent electronics and bioelectronics. Using a TNO membrane, we can fabricate transparent, flexible, and removable electrode patches and wires. However, highly conducting TNO membranes cannot be easily fabricated because of crack formation originating due to the large lattice mismatch between the sacrificial layer and TNO. Herein, La_0.7Sr_0.3MnO₃ was used as a sacrificial layer to reduce the lattice mismatch with TNO, and TNO epitaxial thin films were grown on a SrTiO₃ single-crystal substrate using the sacrificial layer. Although La_0.7Sr_0.3MnO₃ was insoluble in water but soluble in acid, fewer cracks were formed in the millimeter-sized TNO membrane because of the chemical resistance of TNO to most acids and bases. Consequently, the TNO membrane exhibited high crystallinity and electrical conductivity, similar to those of TNO epitaxial thin films.

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毫米级单晶掺杂铌的氧化钛膜具有高导电性和透明度

铌掺杂TiO2 （TNO）是一种透明导电电极，对透明电子学和生物电子学有重要贡献。使用TNO膜，我们可以制造透明，灵活，可移动的电极贴片和导线。然而，由于牺牲层与TNO之间的大晶格不匹配导致裂纹形成，因此不易制备高导电性的TNO膜。本文采用La0.7Sr0.3MnO3作为牺牲层来减少与TNO的晶格失配，并利用牺牲层在SrTiO3单晶衬底上生长TNO外延薄膜。虽然La0.7Sr0.3MnO3不溶于水，但可溶于酸，但由于TNO对大多数酸和碱具有耐化学性，因此在毫米尺寸的TNO膜上形成的裂纹较少。因此，TNO薄膜具有与TNO外延薄膜相似的高结晶度和导电性。

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来源期刊

ACS Applied Electronic Materials Multiple-

CiteScore

7.20

自引率

4.30%

发文量

567

期刊介绍： ACS Applied Electronic Materials is an interdisciplinary journal publishing original research covering all aspects of electronic materials. The journal is devoted to reports of new and original experimental and theoretical research of an applied nature that integrate knowledge in the areas of materials science, engineering, optics, physics, and chemistry into important applications of electronic materials. Sample research topics that span the journal's scope are inorganic, organic, ionic and polymeric materials with properties that include conducting, semiconducting, superconducting, insulating, dielectric, magnetic, optoelectronic, piezoelectric, ferroelectric and thermoelectric. Indexed/Abstracted： Web of Science SCIE Scopus CAS INSPEC Portico