On-Chip Array Fluorescent Sensor for High-Sensitivity Multi-Gas Detection

Abstract

Fluorescence array sensors provide an effective strategy to mitigate the cross-reactivity of single fluorescence materials by exploiting their high dimensionality and exceptional sensitivity. However, conventional fluorescent sensing arrays are often hindered by complex and bulky designs, resulting in low cost-effectiveness and severely restricting their potential for integration into compact sensing devices. Benefiting from its high integration advantage, photonic integration technology offers a promising solution for developing low-cost and miniaturized fluorescent gas sensor arrays. In this article, we present a novel fluorescence array sensor based on a silicon nitride photonic integration platform. This innovative device enables lab-on-chip functionality by integrating a microfluidic channel for efficient gas detection in a few square centimeters. The sensor demonstrates exceptional performance, accurately identifying six types of volatile organic compounds and achieving a remarkably low detection limit of 2.8 ppb for N-methylphenethylamine (MPEA). Notably, it exhibits high precision in detecting MPEA even within complex, high-concentration perfume mixtures. Moreover, this technology enables the expansion of the fluorescence array without increasing the sensor’s volume, offering a practical solution for integrated fluorescence sensor array detection.