Macrosteps dynamics and the growth of crystals and epitaxial layers

Abstract

Step pattern stability of the vicinal surfaces during growth was analyzed using various surface kinetics models. It was shown that standard analysis of the vicinal surfaces provides no indication on the possible step coalescence and therefore could not be used to elucidate macrostep creation during growth. A scenario of the instability, leading go macrostep creation, was based on the dynamics of the step train, i.e. the step structure consisting of the high (train) and low (inter-train) density of the steps. The critical is step motion at the rear of the train which potentially leads to the step coalescence i.e. creation of the double and multiple step. The result of the analysis shows that the decisive factor for the step coalescence is the step density ratio in and out of the train. The ratio lower than 2 prevents double step formation irrespective of the kinetics. For higher ratio the coalesce depends on step kinetics: fast incorporation from lower terrace stabilizes the single steps, fast incorporation from upper leads to step coalescence. The double step is slower than the single steps, so the single steps behind catch up creating multistep and finally macrostep structure. The final surface structure consists of the macrosteps and superterraces, i.e. relatively flat vicinal segments. The macrostep alimentation from lower superterrace leads to emission of the single steps which move forward. Thus the single step motion is dominant crystal growth mode in the presence of the macrosteps. These steps finally are absorbed by the next macrostep. The absorption and emission of single steps sustain the macrostep existence, i.e. the macrostep fate is determined the single step dynamics. The condition for single step emission was derived. In addition, the macrosteps are prone to creation of the overhangs which results from surface dynamics coupling to impingement from the mother phase. The angular preferential access of the bulk material to the macrostep edge, leads to the overhang instability and creation of inclusions and dislocations.